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High Purity Silicon Sputtering Target, 99.999%

High Purity Silicon Sputtering Target, 99.999%

Price range: $90.00 through $200.00

Institutional Procurement & Supply Compliance: As a verified US supplier, Atomfair accepts formal institutional Purchase Orders (POs), contract billing schedules, and custom procurement loops for university and national laboratories, and corporate R&D departments globally.

High Purity Silicon Sputtering Target, 99.999% is a round planar sputtering target with 99.999% purity, 2.33 g/cm^3 density and Varies with doping / resistivity grade; Intrinsic SiApprox. 2.3×10^5 ohm cm electrical resistivity for semiconductor films, silicon-based devices, magnetron sputtering. Available configurations cover thicknesses of 3 mm, 4 mm, 5 mm, 6 mm, 6.35 mm and diameters of 25.4 mm, 50 mm, 50.8 mm, 60 mm, 76.2 mm, 80.0 mm, 101.6 mm, 100 mm, 80 mm. The listed surface condition, dimensional tolerance and bonding options support configuration review before quotation.

SKU: AF-MT-S-SILX-N50X-3AEV
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High Purity Silicon Sputtering Target, 99.999%
Product Type: Round planar sputtering target
Research-grade laboratory product
Product Overview

High Purity Silicon Sputtering Target, 99.999% is a round planar sputtering target with 99.999% purity, 2.33 g/cm^3 density and Varies with doping / resistivity grade; Intrinsic SiApprox. 2.3×10^5 ohm cm electrical resistivity for semiconductor films, silicon-based devices, magnetron sputtering.

Available configurations cover thicknesses of 3 mm, 4 mm, 5 mm, 6 mm, 6.35 mm and diameters of 25.4 mm, 50 mm, 50.8 mm, 60 mm, 76.2 mm, 80.0 mm, 101.6 mm, 100 mm, 80 mm. The listed surface condition, dimensional tolerance and bonding options support configuration review before quotation.
Performance Features
  • 99.999% purity material grade for controlled sputtering workflows.
  • Round planar sputtering target geometry with the listed thickness and diameter options.
  • Surface preparation: Turning / grinding，Ra<=1.6 um (typical).
  • Typical use areas include semiconductor films, silicon-based devices, magnetron sputtering.
Technical Specifications
Parameter Specification / Available Values
Atomfair Model AF-SI-99N999
Purity 99.999%
Material Grade Si 4N5 (intrinsic); Si 4N5 (n-type); Si 4N5 (p-type)
Typical Total Critical Impurities Typical total critical impurities: <=10 ppm
Density 2.33 g/cm^3
Electrical Resistivity Varies with doping / resistivity grade; Intrinsic SiApprox. 2.3×10^5 ohm cm
Surface State Turning / grinding，Ra<=1.6 um (typical)
Dimensional Tolerance Diameter+/-0.10 mm; thickness+/-0.10 mm (typical)
Target Type Round planar sputtering target
Bonding Unbonded; optionalCubacking plate bonding/magnetic shim
Typical Applications semiconductor films, silicon-based devices, magnetron sputtering
Packaging / Notes Vacuum packed with COA; final parameters are confirmed by batch inspection and the agreed configuration.
Available Thicknesses 3 mm, 4 mm, 5 mm, 6 mm, 6.35 mm
Available Diameters 25.4 mm, 50 mm, 50.8 mm, 60 mm, 76.2 mm, 80.0 mm, 101.6 mm, 100 mm, 80 mm
PROCUREMENT CHECK: Confirm model, working range, compatibility, consumables and required configuration before quotation.
DOCUMENTATION REVIEW: Product specifications and configuration details are reviewed against laboratory use requirements.
ACCESSORY MATCHING: Compatible accessories, replacement parts and consumables can be matched according to the selected configuration.
INQUIRY NOTE: Include the required model, configuration and quantity when requesting quotation support.
LABORATORY PROCUREMENT SUPPORT
For model selection, accessory matching, platform compatibility or configuration confirmation, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
Manufacturer: Atomfair LLC
Brand: ATOMFAIR®

Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.

To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.

Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).

Thickness

3 mm, 4 mm, 5 mm, 6 mm, 6.35 mm
Diameter

25.4 mm, 50 mm, 50.8 mm, 60 mm, 76.2 mm, 80.0 mm, 101.6 mm, 100 mm, 80 mm

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