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Vanadium-Tungsten Alloy Sputtering Target (VW (98/2 wt%))
Product Type: Metal alloy sputtering target
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This document records the source-stated processing constraints for the Vanadium-Tungsten Alloy Sputtering Target (VW (98/2 wt%)). The constraints apply to magnetron sputtering parameter limits, bonding and backing integration, and substrate preparation.
- Sputtering parameter window: Operate DC/RF magnetron sputtering only within the stated power density windows of 3-15 W/cm² (DC) or 1-5 W/cm² (RF).
- Argon atmosphere: Maintain an argon process pressure of 0.5-2.0 Pa during deposition.
- Bonding and backing integration: Confirm the selected bonding type and backing plate material are compatible with the deposition system before mounting.
- Substrate preparation: Deposit only onto properly prepared substrates to attain the source-stated adhesion strength.
- Pre-order specification confirmation: Confirm target purity, dimensions, composition ratio, and bonding requirements against the deposition system before ordering.
What deposition rate can be achieved with the VW (98/2 wt%) sputtering target under DC magnetron sputtering conditions?
Under optimized DC magnetron sputtering at 3–15 W/cm² power density and 0.5–2.0 Pa Ar atmosphere, the target achieves deposition rates of 10–80 nm/min with ±5% thickness uniformity across a 100 mm substrate.
What bonding and backing plate options are available for the VW target, and how do they affect compatibility with different sputtering systems?
The target offers optional indium bonding or elastomer bonding, and backing plate options of oxygen-free copper or CuCrZr. These options allow integration with various sputtering system configurations, but the user must confirm compatibility with their specific deposition system before ordering.
What pre-installation checks are critical before using this VW sputtering target in a vacuum deposition system?
The user must confirm the target purity (99.9%), dimensions (1" diameter x 6 mm), composition ratio (98/2 wt% VW), and bonding requirements against their deposition system's constraints. Any mismatch in size, bonding type, or backing plate can affect adhesion and deposition uniformity.
The Vanadium-Tungsten Alloy Sputtering Target (VW 98/2 wt%) with 99.9% purity and ≤50 µm grain size is engineered for DC/RF magnetron sputtering, delivering deposition rates of 10–80 nm/min and ±5% thickness uniformity on 100 mm substrates. Optimal stoichiometric transfer (±2 at%) requires precise control of power density and Ar pressure, and system compatibility must be verified prior to ordering.
Positive
- High purity and low impurity levels: 99.9% (3N) purity with total metallic impurities <1000 ppm and O+N <200 ppm minimizes film contamination and improves resistivity and adhesion.
- Uniform deposition with controlled rate: Achieves deposition rates of 10–80 nm/min with ±5% thickness uniformity across a 100 mm substrate under specified DC/RF conditions.
Trade-offs
- Stoichiometry sensitive to sputtering conditions: The specified ±2 at% stoichiometric transfer is only guaranteed under optimized sputtering parameters—deviation in power density or Ar pressure may alter film composition.
- System compatibility must be verified: Procurement check advises confirming target composition, purity, dimensions, and bonding type against the specific deposition system to avoid operational mismatches.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
