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Yttrium Oxide (Y2O3) Evaporation Material, Pieces, 99.99%, 5mm
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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Suitable for E-beam evaporation with graphite, Al2O3, or BN liners, or W/Mo/Ta boats. The material has a melting point of 2410°C and is supplied as 5mm pieces requiring proper source loading.
- Evaporation Source Hardware: Use E-beam hearth with graphite, Al2O3, or BN liner, or W/Mo/Ta boat for evaporation.
- Evaporation Method Preference: E-beam evaporation is preferred; thermal evaporation is available by request for quotation.
- Material Melting Point: The high melting point of 2410°C requires adequate heating capability in the deposition system.
- Physical Form Handling: The 5mm pieces must be loaded into the evaporation source, ensuring compatibility with crucible or boat dimensions.
- Deposition-Source Compatibility: Verify deposition-source compatibility before quotation to match material behavior and hardware.
Why is E-beam evaporation preferred over thermal evaporation for Y2O3 pieces, and what are the limitations?
E-beam evaporation is preferred for Y2O3 because it provides good performance at the material's high melting point of 2,410°C. Thermal evaporation is only possible by RFQ due to the extreme temperature required, which may exceed standard boat capabilities. The material must be processed using an E-beam hearth with a graphite, Al2O3, or BN liner, or alternatively with W/Mo/Ta boats for thermal evaporation.
What liner and boat materials are compatible with E-beam evaporation of Y2O3 pieces?
For E-beam evaporation, compatible liners include graphite, aluminum oxide (Al2O3), and boron nitride (BN). For thermal evaporation, tungsten (W), molybdenum (Mo), or tantalum (Ta) boats are recommended. The hardware list also specifies graphite and tungsten as compatible source materials. Always confirm that the source geometry accommodates the 5 mm piece size.
What is the significance of the Z-ratio of 1.00 for Y2O3 in thin-film deposition?
A Z-ratio of 1.00 indicates that the acoustic impedance of Y2O3 matches the calibration of the quartz crystal microbalance (QCM), enabling straightforward and accurate film thickness monitoring during E-beam evaporation. This value, explicitly stated in the product specification, simplifies process control and reduces the need for additional calibration adjustments.
Yttrium Oxide (Y2O3) evaporation material in 5mm pieces at 99.99% purity is evaluated for E-beam evaporation with good performance, requiring specific hearth liners (graphite, Al2O3, BN) or W/Mo/Ta boats, and a high melting point of 2,410°C that imposes thermal management constraints.
Positive
- High purity 99.99% specification: The 99.99% purity level enables consistent thin-film stoichiometry and reduces contamination risk in sensitive optical or dielectric layer deposition.
- Defined 5mm piece form factor: The 5mm piece size facilitates controlled source loading and uniform evaporation in E-beam hearths, supporting reproducible film thickness across runs.
Trade-offs
- High melting point requires robust hardware: With a melting point of 2,410°C, the material demands specialized E-beam hearth liners (graphite, Al2O3, BN) or refractory metal boats (W, Mo, Ta), increasing infrastructure and consumable costs.
- Thermal evaporation limited to RFQ: Thermal evaporation is only available by request for quotation, indicating non-standard process compatibility that may delay deployment or require additional process development.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).






