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Tantalum (Ta) Evaporation Material, Pieces, 99.95%, 3-6 mm
Product Type: Pure Metal Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This document describes the technical constraints for processing Tantalum (Ta) evaporation material in vacuum thin-film deposition. The material requires specific source hardware and process parameter matching to achieve reliable film growth.
- E-beam Evaporation Preference: E-beam evaporation is the preferred method and requires a water-cooled copper hearth for safe operation.
- Source Liner Compatibility: The high melting point of 2996°C necessitates a compatible liner material such as graphite, Al2O3, BN, or Ta to prevent crucible damage.
- Z-Ratio Calibration: The Z-ratio of 0.262 is a critical parameter that affects deposition rate monitoring accuracy.
- Particle Size Verification: The piece size range of 3-6 mm must be compatible with the deposition source crucible dimensions to ensure uniform evaporation.
- Hardware Matching: Deposition source hardware and process route must be matched to the material's melting point and film requirements.
How does the 3-6 mm piece size of Tantalum evaporation material affect source loading and deposition uniformity in e-beam systems?
The 3-6 mm piece size is designed for compatibility with water-cooled copper e-beam hearths, ensuring consistent source loading and stable evaporation rates. This size range minimizes spitting and allows uniform thermal distribution, which is critical for achieving repeatable thin-film thickness. The specified form also facilitates handling and loading into the hearth without excessive bridging.
Which liner materials are recommended for use with Tantalum (Ta) evaporation in e-beam deposition to avoid contamination?
Compatible liners for Tantalum evaporation include graphite, Al2O3, BN, and Tantalum itself. These materials are selected to withstand the high melting point of Ta (2,996°C) and prevent chemical reaction with the molten metal. Using one of these liners in a water-cooled copper hearth ensures process stability and film purity.
What are the critical infrastructure requirements for e-beam evaporation of Tantalum (Ta) pieces at 99.95% purity?
The preferred evaporation method is e-beam, using a water-cooled copper hearth to manage the high melting point of 2,996°C. The material's density (16.6 g/cm³) and Z-ratio (0.262) should be considered for deposition rate monitoring and film thickness calibration. Proper vacuum and power supply are required to achieve the necessary evaporation temperature without excessive outgassing.
Tantalum (Ta) evaporation material at 99.95% purity, supplied as 3-6 mm pieces for e-beam deposition, offers high-temperature stability and controlled source loading but requires high-power e-beam operation and Z-ratio calibration for precise film thickness control.
Positive
- High purity 99.95% Tantalum: The 99.95% purity specification minimizes impurity incorporation during e-beam evaporation, enabling consistent film stoichiometry for research-grade deposition.
- Controlled piece size 3-6 mm: The 3-6 mm piece size ensures uniform source loading and stable evaporation rates in water-cooled copper e-beam hearths, reducing process variability.
Trade-offs
- High melting point requires high power: With a melting point of 2,996°C, Tantalum evaporation demands significant e-beam power and may cause thermal stress on hearth liners, necessitating compatible liner materials such as graphite or tantalum.
- Z-ratio impacts thickness monitoring: The Z-ratio of 0.262 requires correction in quartz crystal microbalance (QCM) thickness monitoring to achieve accurate film thickness, adding calibration complexity.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
