|
Ruthenium (Ru) Evaporation Material, Pieces, 99.95%, 1-3 mm
Product Type: Pure Metal Evaporation Material
Research-grade laboratory product
|
|||||||||||||||||||||||||||||||||||||||
|
|||||||||||||||||||||||||||||||||||||||
|
LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
|
|||||||||||||||||||||||||||||||||||||||
|
Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
|
Deposition of this ruthenium evaporation material requires a water-cooled copper e-beam hearth with a compatible liner to prevent contamination. Process parameters must be adjusted according to the material's melting point of 2,310 °C and Z-ratio of 0.182 for accurate film thickness control.
- Source and Liner Compatibility: Use a water-cooled copper e-beam hearth with a compatible liner such as graphite, Al2O3, BN, or Ta.
- Process Parameter Calibration: Adjust e-beam power and sweep pattern based on the material's melting point of 2,310 °C to achieve stable evaporation rate.
- Thickness Monitoring Setup: Incorporate the Z-ratio of 0.182 into the quartz crystal microbalance calibration for accurate film thickness measurement.
- Material Loading Procedure: Load the 1-3 mm pieces into the evaporation source in a manner that ensures even distribution and consistent vapor plume.
- Pre-Deposition Verification: Confirm material identity, purity, form, size range, and pack size against the process requirements before loading.
How does the 99.95% purity of ruthenium evaporation material affect thin film properties?
The 99.95% purity specification minimizes metallic impurities that could alter electrical resistivity, work function, or corrosion resistance of deposited ruthenium films. For applications such as diffusion barriers in semiconductor devices or electrode layers in capacitors, higher purity ensures consistent film stoichiometry and reduces defect density.
What deposition source configurations are compatible with ruthenium evaporation pieces?
The product is optimized for e-beam evaporation using a water-cooled copper hearth with compatible liners such as graphite, Al2O3, BN, or Ta. The high melting point of 2,310°C requires robust thermal management; water cooling prevents hearth damage while the liner material must withstand the molten ruthenium without excessive wetting or reaction.
What considerations are important when handling ruthenium evaporation material in a laboratory?
Ruthenium is a precious metal with a density of 12.3 g/cm³; the small piece size (1-3 mm) requires careful weighing and transfer to avoid loss. The material should be handled in a clean environment to maintain the 99.95% purity, and users should consult the safety data sheet for any specific hazards associated with ruthenium dust or fumes during evaporation.
Ruthenium evaporation material (99.95% purity, 1–3 mm pieces) is engineered for e-beam deposition in water-cooled copper hearths with compatible liners. The high melting point (2310°C) and Z-ratio (0.182) require precise process control and quartz crystal monitor calibration, while the defined particle size facilitates consistent source loading. Purity and form are specified for thin-film applications requiring low contamination.
Positive
- High purity 99.95%: The specified 99.95% purity minimizes film contamination in vacuum deposition, supporting reproducible thin-film properties for research and development.
- Defined particle size range: Pieces sized 1–3 mm enable consistent loading into e-beam hearths and predictable evaporation behavior, reducing process variability.
Trade-offs
- High melting point requires robust e-beam control: A melting point of 2310°C demands high-energy e-beam power and water-cooled hearth management; insufficient cooling or power stability may cause uneven evaporation or hearth damage.
- Z-ratio of 0.182 introduces deposition rate monitoring complexity: The low Z-ratio (0.182) can cause significant sensor head correction errors in quartz crystal microbalance monitors, requiring careful calibration to maintain film thickness accuracy.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
