|
Ruthenium (Ru) Evaporation Material, Pieces, 99.95%, 3-6 mm
Product Type: Pure Metal Evaporation Material
Research-grade laboratory product
|
|||||||||||||||||||||||||||||||||||||||
|
|||||||||||||||||||||||||||||||||||||||
|
LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
|
|||||||||||||||||||||||||||||||||||||||
|
Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
|
This ruthenium evaporation material requires e-beam deposition with a water-cooled copper hearth and compatible liners (graphite, Al2O3, BN, Ta). The high melting point (2310°C) and Z-ratio of 0.182 necessitate precise e-beam power control and rate calibration.
- Evaporation Source Compatibility: The material is compatible with water-cooled copper e-beam hearths and requires a liner material from graphite, Al2O3, BN, or Ta to prevent contamination.
- Melting Point Requirement: The melting point of 2310°C demands sufficient e-beam power to achieve evaporation without thermal damage to the crucible.
- Z-Ratio Calibration: The Z-ratio of 0.182 must be entered into the deposition controller for accurate thickness monitoring.
- Piece Size Loading: The 3-6 mm pieces are suitable for loading into standard e-beam crucibles without further size reduction.
How does the Z-ratio of 0.182 for ruthenium evaporation material influence e-beam deposition rate control?
The Z-ratio of 0.182 indicates that ruthenium has a relatively low acoustic impedance, which affects the calibration of quartz crystal microbalance (QCM) sensors during e-beam evaporation. This value requires recalibration of the deposition rate monitor to ensure accurate film thickness control, as the tooling factor must be adjusted based on the material's Z-ratio. The specified melting point of 2,310°C and density of 12.3 g/cm³ also influence the evaporation behavior.
What liner materials are compatible with e-beam evaporation of ruthenium pieces from a water-cooled copper hearth?
For e-beam evaporation of ruthenium pieces, the compatible liner materials include graphite, Al2O3 (alumina), BN (boron nitride), and Ta (tantalum). The water-cooled copper e-beam hearth is the preferred evaporation source, and the liner choice depends on the specific deposition hardware and process requirements.
What documentation should be verified before procuring ruthenium evaporation material for laboratory use?
Before procurement, buyers should confirm that the certificate of analysis, safety data sheet, shipment conditions, and export requirements align with laboratory use. The product specification includes 99.95% purity, 3-6 mm piece size, and available pack sizes from 1g to 100g. It is recommended to review these documents against the intended application to ensure compliance and safe handling.
Ruthenium (Ru) evaporation pieces at 99.95% purity and 3-6 mm size are suitable for e-beam deposition requiring high melting point (2,310 °C) and controlled film composition, but necessitate specialized hearth liners (graphite/Al2O3/BN/Ta) and accurate rate monitoring due to a low Z-ratio of 0.182.
Positive
- High purity 99.95%: The 99.95% material specification supports consistent film stoichiometry and reduces contamination risk in thin-film deposition.
- Controlled piece size 3-6 mm: The defined 3-6 mm piece geometry facilitates uniform source loading, predictable evaporation rates, and compatibility with e-beam hearths.
Trade-offs
- High melting point requires high-energy e-beam: With a melting point of 2,310 °C, the material demands a high-power e-beam source and proper hearth cooling to avoid overheating or damage.
- Low Z-ratio complicates rate monitoring: A Z-ratio of 0.182 requires careful calibration of quartz crystal monitors to accurately measure film thickness and deposition rate.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
