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Ruthenium (Ru) Evaporation Material, Pellets, 99.99%, 3-6 mm
Product Type: Pure Metal Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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Ruthenium pellets require e-beam evaporation under vacuum, with compatibility confirmed for water-cooled copper hearths and graphite, Al2O3, BN, or Ta liners. The material's high melting point (2310°C), density (12.3 g/cm³), and Z-ratio (0.182) impose specific constraints on deposition source calibration and process parameters.
- Evaporation Source Compatibility: Use only with water-cooled copper e-beam hearths and compatible liners including graphite, Al2O3, BN, or Ta.
- Z-Ratio Calibration: The Z-ratio of 0.182 must be used for e-beam deposition source calibration to ensure accurate film thickness monitoring.
- Density Consideration: The density of 12.3 g/cm³ affects the deposition rate calculation and the required volume of pellets per run.
- Melting Point Requirement: The melting point of 2310°C necessitates sufficient e-beam power to achieve stable evaporation without overheating the hearth.
- Contamination Control: The 99.99% purity specification requires storage in a clean, dry environment and handling with contamination-free tools.
Why is water-cooled copper e-beam hearth recommended for Ruthenium evaporation material?
The product description specifies that water-cooled copper e-beam hearth is preferred for Ruthenium evaporation due to its high melting point of 2,310 °C and density of 12.3 g/cm³. The water cooling prevents overheating of the hearth and ensures stable evaporation conditions for the pellets.
Which liner materials are compatible with Ruthenium pellets for e-beam evaporation?
Compatible liner materials include graphite, Al2O3 (alumina), BN (boron nitride), and Ta (tantalum), as listed in the product specifications. These materials can withstand the high temperature and chemical reactivity of molten ruthenium during e-beam evaporation.
What pack sizes are available for Ruthenium evaporation pellets and what is the minimum order quantity?
Available pack sizes are 1g, 5g, 10g, 25g, and 100g, with a minimum order quantity of 1g. The product is supplied as pellets with a size range of 3-6 mm to facilitate loading into e-beam hearths.
This 99.99% pure ruthenium pellet evaporation material, sized 3-6 mm, is suitable for high-vacuum thin-film deposition in e-beam systems, with a melting point of 2310°C and density 12.3 g/cm³ that require careful source matching and process calibration.
Positive
- 99.99% Purity for Minimal Contamination: The 4N purity specification ensures low impurity levels, critical for achieving reproducible thin-film properties in high-vacuum deposition.
- Pellet Form and Size for E-Beam Compatibility: The defined 3-6 mm pellet size facilitates consistent source loading and evaporation behavior, compatible with water-cooled copper e-beam hearths and various liner materials.
Trade-offs
- High Melting Point Requires High-Power Evaporation: With a melting point of 2310°C, this material demands high-power e-beam systems and careful liner selection to prevent thermal damage and ensure stable evaporation rates.
- Z-Ratio Adjustment Needed for Accurate Thickness Monitoring: The material's Z-ratio of 0.182 deviates from the standard 1.0, requiring recalibration of quartz crystal microbalances to avoid systematic film thickness errors.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
