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Ruthenium (Ru) Evaporation Material, Pellets, 99.95%, 3-6 mm
Product Type: Pure Metal Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This material requires e-beam evaporation using a water-cooled copper hearth with a compatible liner such as graphite, Al2O3, BN, or Ta. The deposition source hardware and process route must be matched to the material's melting point, density, and film requirements.
- E-beam Evaporation Requirement: E-beam evaporation is the preferred method for this Ruthenium pellet material.
- Liner Compatibility: Compatible liners include graphite, Al2O3, BN, and Ta for use with a water-cooled copper hearth.
- Material Properties: The melting point of 2310°C, density of 12.3 g/cm³, and Z-ratio of 0.182 are critical for process parameter matching.
- Procurement Verification: Confirm deposition source geometry, purity, form, size, and pack size before ordering.
How does the Z-ratio of 0.182 for ruthenium pellets influence e-beam evaporation rate control?
The Z-ratio of 0.182 is a material-specific parameter used in quartz crystal microbalance (QCM) controllers to correct for acoustic impedance mismatch during e-beam deposition. Entering this value ensures accurate film thickness monitoring and deposition rate control for ruthenium. The product is supplied as 99.95% pure pellets, 3–6 mm, optimized for consistent evaporation in water-cooled copper e-beam hearths.
What liner materials are compatible with ruthenium pellets in e-beam evaporation?
The product is compatible with water-cooled copper e-beam hearths and liners made of graphite, Al2O3, BN, or Ta. The pellet size of 3–6 mm is designed to fit these liners and support uniform heating. Users should confirm liner compatibility with their specific deposition source geometry before ordering.
What documentation is required when ordering ruthenium evaporation material for laboratory use?
Buyers should confirm the certificate of analysis, safety data sheet, and shipment conditions before quotation. The supplier can review these documents against laboratory use requirements. Export restrictions for ruthenium may apply, so procurement teams should verify compliance with applicable regulations.
This Ruthenium evaporation material (99.95% purity, pellet form, 3-6 mm) is optimized for e-beam deposition with compatible hearth and liner options, but its high melting point and density require precise thermal management and calibration.
Positive
- High purity and defined form: The 99.95% purity and pellet form (3-6 mm) ensure consistent source loading and reproducible film properties for research-grade thin-film deposition.
- Broad hardware compatibility: Compatible with water-cooled copper e-beam hearth and multiple liner materials (graphite, Al2O3, BN, Ta), offering flexibility in existing deposition systems.
Trade-offs
- High melting point requires careful handling: With a melting point of 2,310°C, this material necessitates high-energy e-beam evaporation and robust thermal management to avoid hearth damage or process instability.
- Density and Z-ratio affect thickness monitoring: A density of 12.3 g/cm³ and Z-ratio of 0.182 require precise calibration of quartz crystal monitors to maintain accurate deposition rate control.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).






