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ErbiumOxide (Er2O3) Evaporation Material, Powder, 99.9%, 325 mesh
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This erbium oxide powder must be evaporated using an E-beam hearth with graphite, alumina, or boron nitride liner, or a tungsten, molybdenum, or tantalum boat. The melting point, density, and Z-ratio of the material dictate the required evaporation parameters and source geometry to achieve consistent film deposition.
- Deposition Source Hardware: The material must be evaporated using an E-beam hearth lined with graphite, alumina, or boron nitride, or alternatively a tungsten, molybdenum, or tantalum boat for thermal evaporation by RFQ.
- Evaporation Method Preference: E-beam evaporation is the preferred method, while thermal evaporation requires a quotation request and compatible boat material.
- Process Parameter Matching: Deposition parameters such as temperature ramp rate and power must be adjusted according to the material's melting point of 2350°C, density of 8.64 g/cm³, and Z-ratio of 1.00.
- Source Geometry Confirmation: The deposition source geometry and liner/boat compatibility must be verified before use to avoid material contamination or incomplete evaporation.
Why is the Z-ratio of 1.00 listed for Er2O3 and how does it impact deposition rate monitoring?
The Z-ratio of 1.00 indicates that Er2O3 has a density and acoustic impedance closely matching the quartz crystal sensor, simplifying thickness monitoring during E-beam evaporation. This value is provided for process control and is typical for dense oxide materials; the product specification lists the Z-ratio as **1.00.
What evaporation source hardware is recommended for Er2O3 powder and why is E-beam preferred over thermal evaporation?
E-beam evaporation is preferred for Er2O3 powder due to its high melting point of 2,350°C. For thermal evaporation, a RFQ is required and the material must be loaded in an E-beam hearth with a graphite, Al2O3, or BN liner, or in a W/Mo/Ta boat. The product description explicitly states 'E-beam evaporation preferred; thermal evaporation by RFQ' and lists the compatible hardware.
How does the 325 mesh particle size of this Er2O3 powder affect its suitability for thin-film deposition?
The 325 mesh particle size ensures a consistent powder form that facilitates uniform loading into evaporation sources and promotes controlled evaporation. The product description specifies 'Powder 325 mesh sizing to support source loading and evaporation review,' indicating its role in process reliability for vacuum deposition workflows.
Erbium Oxide (Er2O3) powder with 99.9% purity and 325 mesh size is a research-grade evaporation material for vacuum thin-film deposition, with a high melting point of 2350°C that necessitates E-beam evaporation or RFQ for thermal methods. The product requires careful source compatibility verification to ensure successful deposition.
Positive
- Defined material identity and high purity: The 99.9% purity Er2O3 powder ensures consistent film composition and is traceable to source for process validation.
- Specified powder mesh size for loading: The 325 mesh powder size enables uniform source loading and predictable evaporation rates in E-beam hearths.
Trade-offs
- High melting point constraints: The 2350°C melting point restricts evaporation to E-beam or RFQ-based thermal methods, limiting compatibility with standard thermal evaporation systems.
- Requires pre-purchase compatibility check: Buyers must verify deposition source geometry, hearth liner material, and boat type to ensure proper evaporation without contamination or equipment damage.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).






