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ErbiumOxide (Er2O3) Evaporation Material, Pieces, 99.99%, 325 mesh
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This document outlines the processing and compatibility constraints for Erbium Oxide (Er2O3) evaporation material supplied as 99.99% pure pieces (325 mesh). The material requires specific evaporation source hardware, including an e-beam hearth with graphite, Al2O3, or BN liner, or a W/Mo/Ta boat, and is preferentially used for e-beam evaporation.
- Evaporation Method Preference: E-beam evaporation is the preferred method; thermal evaporation requires RFQ confirmation and alternative boat materials.
- Liner and Boat Compatibility: Use graphite, Al2O3, or BN liners for e-beam hearths, or W/Mo/Ta boats for thermal evaporation to avoid contamination.
- High-Temperature Melting Point: The melting point of 2,350°C demands that the deposition source and liner materials withstand extreme thermal conditions.
- Z-Ratio Calibration: A Z-Ratio of 1.00 simplifies quartz crystal monitor calibration but must be verified against the actual density of the deposited film.
- Particle Size and Form: The 325 mesh pieces form must be compatible with the source loading geometry to ensure uniform evaporation rate and film quality.
What is the significance of the Z-ratio value of 1.00 for Er2O3 in E-beam evaporation?
A Z-ratio of 1.00 indicates optimal acoustic impedance matching for quartz crystal microbalance (QCM) monitoring, meaning no material-specific correction factor is needed for accurate film thickness control during deposition. This is directly stated in the product specifications as the Z-Ratio value for Er2O3.
Can Er2O3 pieces be used in thermal evaporation or only E-beam evaporation?
E-beam evaporation is the preferred method, but thermal evaporation is possible by RFQ using an E-beam hearth with a graphite, Al2O3, or BN liner, or a W, Mo, or Ta boat. The product description explicitly states 'E-beam evaporation preferred; thermal evaporation by RFQ' and lists compatible liner and boat materials.
What melting point does Er2O3 have and how does it affect deposition source selection?
Er2O3 has a melting point of 2,350°C, which requires high-temperature evaporation sources such as E-beam or dedicated refractory boats. The product specification lists compatible evaporation hardware including E-beam hearths with graphite, Al2O3, or BN liners and W, Mo, or Ta boats to handle this high melting point.
Erbium Oxide (Er2O3) evaporation material supplied as 325-mesh pieces with 99.99% purity is optimized for e-beam evaporation in vacuum thin-film deposition, requiring specific source hardware (graphite/Al2O3/BN liner or W/Mo/Ta boat) and process matching due to its high melting point (2350°C) and density (8.64 g/cm³).
Positive
- High-purity 99.99% Er2O3: The 99.99% purity level ensures minimal contamination in thin-film deposition, critical for optical and electronic applications requiring precise stoichiometry and low defect density.
- Specified 325-mesh piece form: The 325-mesh piece size provides consistent loading and controlled evaporation rates in e-beam hearths, reducing the risk of source spitting or uneven film thickness.
Trade-offs
- Specific source hardware required: E-beam evaporation with a graphite/Al2O3/BN liner or W/Mo/Ta boat is mandatory; thermal evaporation is only available by RFQ and may not be compatible with standard boats, limiting process flexibility.
- High melting point (2350°C): The 2350°C melting point demands high-power e-beam systems and careful thermal management, increasing operational complexity and potential for source degradation over extended runs.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
