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ErbiumOxide (Er2O3) Evaporation Material, Pieces, 99.9%, 12 mm
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This material requires deposition source hardware compatible with its high melting point and oxide chemistry. The 12 mm pieces necessitate confirmation of source geometry and loading method prior to use.
- Evaporation Source Compatibility: Use an E-beam hearth with graphite, Al2O3, or BN liner, or a W/Mo/Ta boat for thermal evaporation by RFQ, to avoid chemical reaction or contamination at the 2350°C melting point.
- Material Loading: Confirm that the 12 mm pieces fit the source crucible or boat geometry and that the fill level allows uniform heating without spitting.
- Process Parameter Matching: Set deposition power and ramp rate based on the material's density of 8.64 g/cm³ and Z-ratio of 1.00 to achieve stable evaporation rate.
- Liner Material Selection: Select a liner material that is chemically inert to Er2O3 at evaporation temperatures to prevent film contamination.
Why is E-beam evaporation the preferred method for Er2O3 pieces?
Er2O3 has a melting point of 2,350°C, which requires the high-energy density of E-beam evaporation for efficient deposition. Thermal evaporation is available by RFQ but may require additional measures to handle the high melting point, as noted in the product specifications.
What liner or boat materials are compatible with Er2O3 evaporation material?
For E-beam evaporation, Er2O3 pieces can be used with graphite, Al2O3, or BN liners. For thermal evaporation, W, Mo, or Ta boats are suitable. These recommendations are provided in the product's evaporation source specifications.
What pack sizes are available for Er2O3 evaporation material and how does form factor affect deposition?
Er2O3 is supplied as 12 mm pieces in pack sizes of 25g, 100g, 500g, and 1kg. The piece form and size are designed for consistent loading in E-beam hearths and boats, ensuring reproducible evaporation rates during thin-film deposition.
Erbium oxide (Er2O3) evaporation material supplied as 12 mm pieces at 99.9% purity, with a melting point of 2350°C and density 8.64 g/cm³. The material is optimized for E-beam evaporation with multiple liner options, but thermal evaporation requires RFQ confirmation.
Positive
- Defined physical form and size: Supplied as 12 mm pieces, facilitating direct loading into standard E-beam hearths or thermal boats without additional processing.
- Multiple evaporation source compatibility: Compatible with both E-beam hearths (graphite, Al2O3, BN liners) and W/Mo/Ta boats, offering flexibility in deposition system configuration.
Trade-offs
- E-beam evaporation preferred, thermal limited: E-beam evaporation is the recommended method; thermal evaporation requires RFQ, potentially restricting process options for labs without E-beam capability.
- High melting point requires specialized liners: With a melting point of 2350°C, the material necessitates compatible liner materials (graphite, Al2O3, BN) to avoid crucible contamination and ensure stable evaporation.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
