Description
A square 5*5mm SiC substrate available in industrial, research, and dummy grades. Ideal for small-scale optoelectronic and high-power device applications. Features high thermal conductivity and low defect density.
| Parameter | Industrial Grade (P Grade) | Research Grade (R Grade) | Dummy Grade (D Grade) |
|---|---|---|---|
| Dimensions | 5*5mm±0.2mm | 5*5mm±0.2mm | 5*5mm±0.2mm |
| Thickness | 350um±25 um | 350um±25 um | 350um±25 um |
| Wafer Orientation | Off axis: 2.0°-4.0° toward [1120] ±0.5° (4H/6H-P), On axis:(111)±0.5° (3C-N) | Off axis: 2.0°-4.0° toward [1120] ±0.5° (4H/6H-P), On axis:(111)±0.5° (3C-N) | Off axis: 2.0°-4.0° toward [1120] ±0.5° (4H/6H-P), On axis:(111)±0.5° (3C-N) |
| Micropipe Density | 0cm² | 0cm² | 0cm² |
| Resistivity (4H/6H-P) | ≤0.10Ω·cm | ≤0.10Ω·cm | ≤0.10Ω·cm |
| Resistivity (3C-N) | ≤0.8mΩ·cm | ≤0.8mΩ·cm | ≤0.8mΩ·cm |
| Primary Flat Orientation (4H/6H-P) | {10-10}±5.0° | {10-10}±5.0° | {10-10}±5.0° |
| Primary Flat Orientation (3C-N) | {1-10}±5.0° | {1-10}±5.0° | {1-10}±5.0° |
| Primary Flat Length | 15.9mm±1.7mm | 15.9mm±1.7mm | 15.9mm±1.7mm |
| Secondary Flat Length | 8.0mm±1.7mm | 8.0mm±1.7mm | 8.0mm±1.7mm |
| Secondary Flat Orientation | 90° CW from Prime flat ±5.0° | 90° CW from Prime flat ±5.0° | 90° CW from Prime flat ±5.0° |
| Edge Exclusion | 3mm | 3mm | 3mm |
| TTV/Bow/Warp | ≤2.5μm/≤5μm/≤15μm/≤30μm | ≤2.5μm/≤5μm/≤15μm/≤30μm | ≤2.5μm/≤5μm/≤15μm/≤30μm |
| Surface Roughness (Polish) | Ra≤1 nm | Ra≤1 nm | Ra≤1 nm |
| Surface Roughness (CMP) | Ra≤0.2 nm | Ra≤0.2 nm | Ra≤0.2 nm |
| Edge Cracks | None | 1 allowed, ≤1 mm | None |
| Hex Plates | ≤1% cumulative area | ≤3% cumulative area | ≤3% cumulative area |
| Polytype Areas | None | ≤2% cumulative area | ≤5% cumulative area |
| Si Surface Scratches | ≤3 scratches, ≤1×wafer diameter cumulative length | ≤5 scratches, ≤1×wafer diameter cumulative length | ≤8 scratches, ≤1×wafer diameter cumulative length |
| Edge Chips | None | ≤3 allowed, ≤0.5 mm each | ≤5 allowed, ≤1 mm each |
| Si Surface Contamination | None | None | None |
| Packaging | Multi-wafer Cassette or Single Wafer Container | Multi-wafer Cassette or Single Wafer Container | Multi-wafer Cassette or Single Wafer Container |
If you are interested or have any questions, please contact us at inquiry@atomfair.com
Disclaimer: Sold exclusively for laboratory research.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
