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Yttrium Oxide (Y2O3) Evaporation Material, Pieces, 99.99%, 25-50 nm
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This material requires specific evaporation source hardware and liner materials to achieve optimal deposition results. Process route must be matched to material behavior, melting point, and film thickness requirements.
- Evaporation Source Compatibility: Use e-beam hearth with graphite, Al2O3, or BN liners, or W/Mo/Ta boats for thermal evaporation.
- Evaporation Method Preference: E-beam evaporation is the preferred method, while thermal evaporation requires RFQ and compatible boat materials.
- Process Matching Requirement: Confirm deposition source geometry and material behavior to ensure consistent film properties.
What is the recommended evaporation source and liner material for Y2O3 pieces to achieve good deposition performance?
The recommended evaporation method is E-beam evaporation, which provides good performance. A graphite, Al2O3, or BN liner should be used in the E-beam hearth, or alternatively a W, Mo, or Ta boat. Thermal evaporation is possible by RFQ but is not the preferred method.
What is the melting point of Y2O3 and how does it influence the choice of evaporation hardware?
Y2O3 has a melting point of 2,410°C and a density of 5.01 g/cm³. These high-temperature properties require a suitable evaporation source such as an E-beam hearth with refractory liners (graphite, Al2O3, BN) or boats made of tungsten, molybdenum, or tantalum to withstand the operating conditions.
What is the Z-ratio of Y2O3 and why is it important for quartz crystal monitoring during thin-film deposition?
The Z-ratio of Y2O3 is listed as 1.00. This value is a material property used in quartz crystal microbalance calibration to accurately measure and control film thickness during deposition, as it accounts for the acoustic impedance mismatch between the crystal and the deposited material.
Yttrium Oxide (Y2O3) evaporation material in pieces form with 99.99% purity and 25-50 nm particle size is evaluated for e-beam evaporation in thin-film deposition. The material's high melting point (2,410°C) and density (5.01 g/cm³) require specific hearth liners (graphite, Al2O3, BN) or refractory metal boats (W, Mo, Ta), and its Z-ratio of 1.00 simplifies thickness monitoring, but the nanoscale pieces demand careful handling to avoid airborne loss and contamination.
Positive
- High purity for film integrity: 99.99% purity minimizes impurity incorporation into deposited films, supporting consistent optical or dielectric properties in Y2O3 layers.
- Z-ratio of 1.00 simplifies monitoring: A Z-ratio of 1.00 allows direct quartz crystal microbalance (QCM) thickness monitoring without correction factors, reducing calibration complexity during e-beam evaporation.
Trade-offs
- High melting point requires robust hardware: Melting point of 2,410°C necessitates e-beam evaporation with specific hearth liners (graphite, Al2O3, BN) or refractory metal boats (W, Mo, Ta), limiting compatibility with standard thermal evaporation setups without RFQ.
- Nanoscale pieces require careful handling: Pieces sized 25-50 nm are prone to electrostatic dispersion and airborne loss during transfer, requiring controlled environment handling and anti-static tools to maintain yield and avoid contamination.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
