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Tantalum Nitride (TaN) Evaporation Material, Pellets, 99.95%, 150 µm
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This material requires an e-beam evaporation source with a compatible liner or high-temperature crucible due to its melting point of 3360°C. Deposition-source compatibility and process route must be verified to match the material's properties and film requirements.
- Deposition source compatibility: Use an e-beam hearth with a compatible liner; for thermal evaporation, evaluate a high-temperature crucible via RFQ.
- Process route matching: Match the evaporation source hardware and process route to the material's melting point (3360°C) and film requirements.
Why is e-beam evaporation preferred for TaN pellets, and when is thermal evaporation feasible?
E-beam evaporation is the preferred method for tantalum nitride (TaN) pellets due to the material's high melting point (3,360°C) and density (16.3 g/cm³), which require the concentrated energy of an electron beam for efficient evaporation. Thermal evaporation may be considered only after a request for quotation (RFQ) to evaluate feasibility with a high-temperature crucible and compatible liner, as standard thermal sources may not achieve the necessary temperature or material compatibility.
What crucible or liner configuration is required for evaporating TaN pellets in an e-beam system?
TaN pellets require an e-beam hearth with a compatible liner to prevent chemical reaction or contamination at high temperatures. For applications needing higher thermal stability, a high-temperature crucible is available by request for quotation (RFQ). The specific hardware must be matched to the material's melting point and chemical behavior to ensure successful deposition.
How does the 150 µm pellet size affect handling and evaporation performance for TaN?
The 150 µm pellet size is specified to support consistent source loading and evaporation performance in vacuum deposition systems. Buyers should confirm that this size range is compatible with their deposition source geometry to ensure proper material flow and evaporation uniformity.
Tantalum Nitride (TaN) evaporation pellets at 99.95% purity and 150 µm size are evaluated for E-beam deposition, offering high melting point (3,360 °C) and density (16.3 g/cm³) suited for hard, conductive thin films, but requiring careful source compatibility and thermal management.
Positive
- High purity and defined form: 99.95% purity and pellet form with 150 µm sizing enable consistent evaporation behavior and film stoichiometry for research-grade thin-film deposition.
- High melting point and density: Melting point of 3,360 °C and density of 16.3 g/cm³ support stable E-beam evaporation for hard, refractory nitride films with good adhesion.
Trade-offs
- E-beam preferred; thermal limited: E-beam evaporation is preferred; thermal feasibility requires RFQ, and high-temperature crucibles are needed, adding procurement and setup complexity.
- Source geometry must be confirmed: Buyers must verify deposition source geometry and liner compatibility before ordering to avoid misfit with existing E-beam hearth hardware.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
