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Tantalum Nitride (TaN) Evaporation Material, Pellets, 99.95%, 35 µm
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This document outlines the processing and compatibility constraints for Tantalum Nitride (TaN) evaporation material pellets. The material is intended for vacuum thin-film deposition and requires specific deposition source hardware and process matching.
- Deposition Source Compatibility: The material must be evaporated using an E-beam hearth with a compatible liner; high-temperature crucible use is available by request for quotation.
- Process Route Matching: E-beam evaporation is the preferred method, and thermal evaporation feasibility requires a separate request for quotation.
- Material Properties Impact: The melting point of 3360 °C and density of 16.3 g/cm³ require high-temperature source hardware and careful process parameter optimization.
- Purity and Form Constraints: The material is supplied as 99.95% pure pellets with 35 µm particle size, requiring confirmation of compatibility with the deposition source geometry.
How does the high melting point of 3,360°C affect the evaporation process for Tantalum Nitride (TaN) pellets?
The melting point of 3,360°C is notably high, which is why E-beam evaporation is the preferred method for TaN pellets; it can achieve the necessary energy density to sublimate or evaporate the material without decomposition. The high density of 16.3 g/cm³ also influences deposition rate and film density. Buyers should confirm their E-beam source and hearth liner are rated for these temperatures, and that the Z-ratio of 1.00 is used for accurate QCM thickness monitoring.
Can Tantalum Nitride (TaN) pellets be used in a thermal evaporation system, or is E-beam evaporation required?
E-beam evaporation is preferred for TaN pellets due to the material's high melting point of 3,360°C and the need for a controlled energy input. Thermal evaporation may be feasible under specific conditions, but a request for quotation (RFQ) is required to evaluate compatibility with a high-temperature crucible and compatible liner. Buyers should confirm their deposition source geometry and required quantity before ordering.
What is the significance of the 35 µm pellet size specification for Tantalum Nitride (TaN) evaporation material?
The 35 µm pellet size is specified to enable consistent source loading and uniform thermal contact with the E-beam hearth liner, which is critical for achieving reproducible evaporation rates and film stoichiometry. This particle size range, combined with the 99.95% purity, ensures that the material meets the demands of research-grade vacuum deposition workflows. Buyers should verify that the pellet size is compatible with their source feeder or crucible geometry.
Tantalum Nitride (TaN) pellets at 99.95% purity and 35 µm size are evaluated for E-beam evaporation in thin-film deposition, with a high melting point of 3,360°C and density of 16.3 g/cm³ requiring compatible hearth liners and high-temperature crucibles, while the Z-ratio of 1.00 simplifies thickness monitoring but thermal feasibility for alternative methods requires RFQ confirmation.
Positive
- High purity and defined form: 99.95% purity and pellet form with 35 µm sizing ensure consistent source loading and deposition process matching for research-grade thin-film applications.
- Z-ratio of 1.00 simplifies monitoring: A Z-ratio of 1.00 eliminates the need for correction factors in quartz crystal microbalance thickness monitoring, reducing calibration complexity during E-beam evaporation.
Trade-offs
- E-beam evaporation preferred: Thermal evaporation feasibility requires RFQ confirmation, limiting direct deployment to E-beam systems with compatible hearth liners and high-temperature crucibles.
- High melting point demands specialized hardware: A melting point of 3,360°C necessitates high-temperature crucibles and compatible liners, increasing infrastructure requirements and potential procurement lead times.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).






