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Molybdenum Oxide (MoO3) Evaporation Material, Pellets, 99.9%, 8-75 nm
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This material requires vacuum deposition equipment with an e-beam source or thermal evaporation system. Use graphite, alumina, or boron nitride liners for e-beam hearths, or tungsten, molybdenum, or tantalum boats for thermal evaporation.
- Evaporation Source Compatibility: Confirm that the evaporation source hardware, including hearth liner or boat material, is compatible with MoO3 to avoid contamination or reaction at the melting point of 795°C.
- Deposition Rate Monitoring: Calibrate the quartz crystal monitor using the provided Z-ratio of 1.00 for accurate thickness measurement during deposition.
- Pellet Size Handling: Ensure the pellet size range of 8-75 nm is compatible with the source crucible or boat geometry to prevent bridging or uneven evaporation.
- Thermal Evaporation Consideration: For thermal evaporation, submit an RFQ to confirm appropriate boat material and process parameters, as standard e-beam operation is preferred.
What is the Z-ratio of MoO3 evaporation material and why does it matter for thin-film thickness monitoring?
The Z-ratio is 1.00, as specified in the technical data. This value simplifies quartz crystal microbalance (QCM) calibration because no tooling factor correction is required for this material, enabling direct thickness monitoring during deposition.
Which liner materials are recommended for E-beam evaporation of MoO3 pellets?
For E-beam evaporation, the recommended liner materials are graphite, Al2O3, or BN. Alternatively, a W/Mo/Ta boat can be used for thermal evaporation via RFQ. These options are explicitly listed in the evaporation source specifications to ensure compatibility with the MoO3 pellets.
What is the melting point of MoO3 and how does it affect deposition process conditions?
The melting point is 795°C, which is relatively low for an oxide, allowing evaporation at moderate temperatures. The density is 4.69 g/cm³, and the product is supplied as pellets sized 8-75 nm, which influences source loading and evaporation rate consistency. These parameters should be matched to the deposition source hardware and process route.
Molybdenum Oxide (MoO3) pellets (99.9% purity, 8–75 nm) are specified for e-beam evaporation, with thermal evaporation available by RFQ. The material requires confirmation of deposition source geometry, liner, and boat compatibility before ordering.
Positive
- High-purity MoO3 pellets for controlled deposition: MoO3 pellets with 99.9% purity and 8–75 nm particle size provide defined material identity for reproducible thin-film deposition in vacuum systems.
- Clear evaporation method guidance: E-beam evaporation is preferred; thermal evaporation is supported by RFQ with specified liner materials (graphite, Al2O3, BN, W, Mo, Ta), enabling process matching.
Trade-offs
- Deposition-source compatibility must be confirmed: Buyers must verify that the evaporation source geometry, liner, and boat materials match the specified hardware (e-beam hearth with graphite/Al2O3/BN liner or W/Mo/Ta boat) before ordering.
- Thermal evaporation requires RFQ and specific liners: Thermal evaporation is not a standard option; it requires a request for quotation and use of specific liner materials, adding lead time and infrastructure requirements.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).






