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Cerium(IV)Oxide (CeO2) Evaporation Material, Pieces, 99.99%, 325 mesh
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This material requires careful matching of deposition source hardware to achieve optimal e-beam evaporation performance. Compatibility with specific liner and boat materials must be verified before use to prevent contamination or process failure.
- Deposition Source Matching: Match the evaporation source hardware and process route to the material's melting point and evaporation behavior to ensure successful film deposition.
- Liner and Boat Selection: Select e-beam hearth liners made of graphite, alumina (Al2O3), or boron nitride (BN), or use boats of tungsten, molybdenum, or tantalum for optimal performance.
- Thermal Evaporation Limitation: Thermal evaporation is not recommended without RFQ due to the high melting point of approximately 2600°C, which may exceed standard thermal source capabilities.
- Material Form Handling: Handle the pieces (325 mesh) carefully to avoid particle size segregation or contamination before loading into the deposition source.
- Pre-Use Verification: Verify material identity, purity, form, and pack size against the deposition system requirements before opening the container.
What is the recommended evaporation method for Cerium(IV)Oxide (CeO2) pieces, and why is e-beam evaporation preferred over thermal evaporation?
E-beam evaporation is the preferred method for CeO2 pieces due to its good performance with this material. Thermal evaporation is available only by RFQ (request for quotation). For e-beam deposition, a graphite, Al2O3, or BN liner is recommended, or a W, Mo, or Ta boat can be used. The high melting point of approximately 2600°C makes e-beam evaporation more suitable for controlled thin-film deposition.
Which liner or boat materials are compatible with e-beam or thermal evaporation of CeO2 pieces?
For e-beam evaporation, a graphite, Al2O3, or BN liner is recommended, or alternatively a tungsten (W), molybdenum (Mo), or tantalum (Ta) boat. For additional sheet hardware, tantalum and graphite are specified. These material choices are based on the high melting point (~2600°C) and chemical compatibility with CeO2 during evaporation.
What are the melting point, density, and Z-ratio of CeO2 evaporation material, and how do they influence deposition process parameters?
Cerium(IV)Oxide (CeO2) has a melting point of approximately 2600°C, a density of 7.13 g/cm³, and a Z-ratio of 1.00. These physical properties dictate the required evaporation source power, deposition rate, and film uniformity. The high melting point necessitates e-beam evaporation for reliable sublimation, while the Z-ratio of 1.00 simplifies quartz crystal monitor calibration for thickness control.
This Cerium(IV) Oxide evaporation material offers 99.99% purity in 325 mesh pieces, optimized for e-beam evaporation with good performance using graphite, Al2O3, BN, or W/Mo/Ta liners, but its high melting point (~2600°C) restricts thermal evaporation to RFQ-only and requires careful process matching.
Positive
- High purity and defined particle size: 99.99% purity and 325 mesh sizing ensure batch-to-batch consistency for reproducible thin-film deposition in vacuum processes.
- Good e-beam performance with liner flexibility: E-beam evaporation performance is rated good with compatibility across graphite, Al2O3, BN liners or W/Mo/Ta boats, offering process flexibility for different deposition systems.
Trade-offs
- High melting point limits deposition methods: Melting point of ~2600°C requires high-power e-beam sources and refractory liners; thermal evaporation is not standard and must be requested via RFQ, increasing equipment and process complexity.
- Pre-application process validation required: Buyers must confirm deposition source geometry, pack size, certificate requirements, and shipment conditions before ordering, as mismatches can delay or prevent successful deposition.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).






