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Zirconium (Zr) Evaporation Material, Pieces, 99.99%, 1-3 mm
Product Type: Pure Metal Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This zirconium evaporation material requires e-beam evaporation using a water-cooled copper hearth with a compatible liner (graphite, Al2O3, BN, or Ta). The material's melting point of 1852°C, density of 6.49 g/cm³, and Z-ratio of 0.6 must be used to calibrate deposition parameters and monitor film thickness.
- Evaporation Source Compatibility: Select a water-cooled copper e-beam hearth and choose a liner material compatible with zirconium, such as graphite, Al2O3, BN, or Ta.
- Process Parameter Calibration: Use the specified melting point, density, and Z-ratio to set e-beam power, sweep pattern, and deposition rate monitor calibration.
- Material Loading: Load the 1-3 mm zirconium pieces evenly into the hearth liner to ensure uniform melting and avoid spitting during evaporation.
- Purity Consideration: Maintain a clean vacuum environment and handle the 99.99% pure material with care to prevent contamination that could affect film quality.
- Pre-Use Compatibility Check: Confirm that the material form, size, and pack size match the deposition source geometry and required quantity before opening the vacuum chamber.
Why is e-beam evaporation the preferred method for zirconium evaporation material?
E-beam evaporation is preferred for zirconium because it has a high melting point of 1,852°C, which makes thermal evaporation inefficient. E-beam provides localized heating to reach the required temperature without excessive thermal load on the source. The Z-ratio of 0.6 is also a key parameter for e-beam deposition rate monitoring using quartz crystal microbalance sensors.
What liner materials are compatible with e-beam evaporation of zirconium?
Compatible liner materials for e-beam evaporation of zirconium include graphite, Al2O3 (alumina), BN (boron nitride), and Ta (tantalum). These materials can withstand the high temperatures and chemical interaction with molten zirconium. The standard evaporation source is a water-cooled copper e-beam hearth.
What is the significance of the Z-ratio (0.6) for zirconium in e-beam deposition?
The Z-ratio of 0.6 is a material-specific factor used to calibrate the quartz crystal microbalance (QCM) for accurate deposition rate and thickness monitoring. It accounts for the acoustic impedance mismatch between zirconium and the quartz crystal sensor. This value must be entered into the deposition controller to ensure correct film thickness measurement.
Zirconium (Zr) evaporation material with 99.99% purity in pieces of 1-3 mm is evaluated for e-beam evaporation thin-film deposition. The high purity supports reproducible film quality, but deployment requires compatible e-beam hardware, water-cooled hearth or suitable liners, and thermal management due to the melting point of 1852°C and Z-ratio of 0.6.
Positive
- 99.99% high purity: The 99.99% purity specification minimizes contamination in deposited films, ensuring consistent, reproducible thin-film properties critical for research-grade vacuum deposition processes.
- Defined form and size range: Supplied as pieces with 1-3 mm dimensions, this form factor facilitates controlled loading into e-beam evaporation sources and supports consistent evaporation rate behavior during deposition runs.
Trade-offs
- E-beam hardware requirement: Evaporation is preferred via e-beam method, requiring a water-cooled copper hearth or compatible liner (graphite/Al2O3/BN/Ta), which adds specific infrastructure and compatibility checks for lab deployment.
- High melting point thermal constraint: With a melting point of 1852°C, the material demands high-power e-beam sources and careful thermal management to avoid substrate or chamber overheating during prolonged deposition.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
