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Ruthenium (Ru) Evaporation Material, Pieces, 99.99%, 3-6 mm
Product Type: Pure Metal Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This ruthenium evaporation material requires e-beam deposition using a water-cooled copper hearth with a compatible liner of graphite, Al2O3, BN, or Ta. The material's high melting point and Z-ratio must be considered for accurate deposition rate monitoring.
- Evaporation method: Use e-beam evaporation with a water-cooled copper hearth and a compatible liner material.
- Liner compatibility: Compatible liners include graphite, Al2O3, BN, and Ta.
- Melting point: Melting point of 2,310 °C influences power settings during evaporation.
- Z-ratio: Z-ratio of 0.182 must be used for quartz crystal monitor calibration.
- Physical form: Pieces of 3-6 mm size require appropriate hearth loading to avoid bridging or uneven melt.
How does the Z-ratio of 0.182 affect thickness monitoring during ruthenium e-beam evaporation?
The Z-ratio of 0.182 is a material-specific parameter used in quartz crystal microbalance (QCM) thickness monitoring for e-beam evaporation. This value indicates the acoustic impedance ratio relative to quartz, which is required to calibrate the deposition rate and final film thickness accurately. The product specification lists the Z-ratio as 0.182.
Which liner materials are compatible with ruthenium evaporation given its melting point of 2,310°C?
For ruthenium evaporation at its melting point of 2,310°C, compatible liner materials include graphite, Al2O3, BN, and Ta. These materials are listed as compatible in the product description and can withstand the high temperature without contaminating the melt.
What is the recommended evaporation method for ruthenium pieces and why is water-cooled copper hearth preferred?
Ruthenium pieces are preferably evaporated using e-beam evaporation with a water-cooled copper hearth. The water-cooling prevents the hearth from melting or reacting with the molten ruthenium, and the copper provides good thermal conductivity. The product description states 'E-beam evaporation preferred' and specifies 'Water-cooled copper e-beam hearth' as the evaporation source.
Ruthenium evaporation material in piece form with 99.99% purity and 3-6 mm size range, optimized for e-beam evaporation with water-cooled copper hearth and compatible liners, requiring careful source geometry matching and high-power deposition equipment.
Positive
- High Purity and Defined Form: 99.99% purity and 3-6 mm piece form ensure consistent evaporation behavior and film quality in e-beam deposition.
- Well-Defined Physical Properties: Melting point of 2,310°C, density 12.3 g/cm³, and Z-ratio 0.182 allow accurate thickness monitoring and process control.
Trade-offs
- Stringent Hardware Compatibility: Requires water-cooled copper e-beam hearth with specific liner materials (graphite, Al2O3, BN, Ta), limiting use to compatible systems.
- Precise Sizing and Geometry Matching: 3-6 mm piece size must match source geometry; improper fit may cause feeding issues or incomplete evaporation, and high melting point demands high-power e-beam sources.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
