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Tantalum Nitride (TaN) Evaporation Material, Pellets, 99.9%, 50 µm
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This material requires e-beam evaporation using a compatible liner and high-temperature crucible for thermal processing. Deposition hardware and process parameters must be matched to the material's melting point (3360°C) and density (16.3 g/cm³) to ensure uniform film deposition.
- Evaporation Method Constraint: E-beam evaporation is preferred; thermal evaporation requires a high-temperature crucible by RFQ.
- Source Geometry Compatibility: Buyers must confirm deposition source geometry, liner compatibility, and crucible requirements before use.
- Pellet Size Constraint: The 50 µm pellet size affects source loading and evaporation rate, requiring verification with the deposition system.
What is the density of TaN pellets and how does it affect the loading weight for a given crucible volume?
The density of TaN pellets is 16.3 g/cm³. This high density means that for a given crucible volume, the weight of material required to fill it is higher than for lower-density materials. Users should calculate the required mass based on their crucible capacity and desired film thickness.
Why is the melting point of TaN (3,360°C) a critical factor in choosing the evaporation method?
The melting point of TaN is 3,360°C, which is extremely high. This necessitates the use of E-beam evaporation as the preferred method because it can achieve the necessary temperatures. Thermal evaporation may not reach this temperature without specialized high-temperature crucibles, which are available by RFQ.
What is the Z-ratio value for TaN and why is it important for deposition monitoring?
The Z-ratio for TaN is listed as 1.00, representing the acoustic impedance ratio relative to quartz. This value is used in quartz crystal microbalance (QCM) sensors to correct thickness readings. A Z-ratio of 1.00 simplifies calibration because no correction factor is needed, but users should still verify with their system.
Tantalum Nitride (TaN) pellets at 99.9% purity and 50 µm size are evaluated for E-beam evaporation deposition, with a high melting point of 3,360 °C and density of 16.3 g/cm³, requiring compatible hearth liners and high-temperature crucibles for thermal processing.
Positive
- High-purity 99.9% TaN pellets: The 99.9% purity specification supports consistent film stoichiometry and reduces contamination risk in thin-film deposition for research-grade applications.
- Defined pellet form and size: Supplied as 50 µm pellets, this form factor facilitates controlled source loading and uniform evaporation in E-beam systems, minimizing process variability.
Trade-offs
- E-beam evaporation preferred: Thermal evaporation requires RFQ feasibility confirmation, limiting direct process compatibility and necessitating additional engineering assessment for alternative deposition methods.
- High melting point constraint: With a melting point of 3,360 °C, the material demands high-temperature crucibles and compatible hearth liners, increasing infrastructure requirements and operational complexity.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
