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Tantalum (Ta) Evaporation Material, Pellets, 99.95%, 3-6 mm
Product Type: Pure Metal Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This tantalum pellet material requires e-beam evaporation using a water-cooled copper hearth with compatible graphite, Al2O3, BN, or Ta liners. The 3–6 mm pellet size and Z-ratio of 0.262 affect source loading and deposition rate monitoring.
- Evaporation Method Requirement: E-beam evaporation is required to achieve the melting point of 2,996 °C.
- Liner Compatibility: Use only graphite, Al2O3, BN, or Ta liners to avoid contamination or hearth damage.
- Pellet Size Constraint: The 3–6 mm pellet size must be verified for fit within the selected e-beam hearth or liner.
- Z-Ratio Calibration: The Z-ratio of 0.262 must be entered into the deposition controller for accurate thickness monitoring.
- Source Geometry Matching: Confirm the pellet form and size match the source geometry to ensure stable evaporation and material utilization.
Why is Tantalum evaporation material supplied as 99.95% pure pellets of 3–6 mm rather than other forms?
The 99.95% purity specification minimizes contamination in deposited thin films, while the pellet form (3–6 mm) is specifically sized for consistent loading and evaporation in e-beam systems using a water-cooled copper hearth. The high melting point (2,996 °C) and density (16.6 g/cm³) of Tantalum make pellet geometry critical for controlled melt and deposition without spitting or uneven vaporization.
Which liner materials are compatible with Tantalum pellets during e-beam evaporation?
The product description explicitly lists compatible liner materials as graphite, Al₂O₃, BN, or Ta. Using an incompatible liner can lead to chemical reaction or contamination at the high melting point of Tantalum (2,996 °C), so the liner must be selected from these verified options to maintain film purity and process stability.
How does the Z-ratio of 0.262 affect thickness monitoring during Tantalum e-beam evaporation?
The Z-ratio of 0.262 is used in quartz crystal microbalance (QCM) thickness monitors to correct for the acoustic impedance mismatch between the deposited Tantalum film and the quartz crystal. A Z-ratio far from 1.0 means the tooling factor must be calibrated specifically for Tantalum to avoid systematic errors in film thickness measurement; this value is provided to support accurate deposition control in high-purity thin-film applications.
This tantalum evaporation material in pellet form with 99.95% purity and 3–6 mm size is optimized for e-beam deposition of high-melting-point metal films, but requires careful thermal management and thickness monitor calibration due to its high density and melting point.
Positive
- High purity and specified pellet form: 99.95% purity and 3–6 mm pellet size ensure reproducible deposition conditions and source loading consistency for thin-film workflows.
- Flexible pack size options: Available in 25g, 100g, 500g, and 1kg packs, allowing scaling from R&D experiments to pilot production volumes.
Trade-offs
- High melting point requires e-beam evaporation: Melting point of 2,996°C necessitates e-beam evaporation hardware and careful thermal management; not suitable for thermal evaporation sources.
- High density and Z-ratio affect thickness monitoring: Density of 16.6 g/cm³ and Z-ratio of 0.262 require recalibration of quartz crystal microbalance monitors for accurate film thickness control.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).






