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Ruthenium (Ru) Evaporation Material, Pellets, 99.95%, 1-3 mm
Product Type: Pure Metal Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This document specifies the hardware and process constraints for ruthenium evaporation pellets. Adherence to these constraints is required to achieve reproducible thin-film deposition and avoid material waste or equipment damage.
- Evaporation Source Compatibility: Use a water-cooled copper e-beam hearth with a compatible liner (graphite, Al2O3, BN, or Ta) to prevent crucible reaction and contamination.
- Deposition Method Requirement: E-beam evaporation is the preferred method due to the high melting point of ruthenium (2310 °C).
- Calibration Parameter: The Z-ratio of 0.182 must be entered into the quartz crystal monitor for accurate thickness measurement during deposition.
- Process Matching: Confirm that the deposition source geometry and power capabilities are sufficient to melt ruthenium pellets without excessive spitting.
What is the significance of the Z-ratio of 0.182 for Ruthenium evaporation material in e-beam deposition?
The Z-ratio of 0.182 is used to calibrate quartz crystal microbalance (QCM) sensors for accurate film thickness monitoring during e-beam evaporation. This value must be entered into the deposition controller to correct for the acoustic impedance mismatch between ruthenium and the quartz crystal, ensuring precise thickness control as specified in the product's technical parameters.
Which liner materials are compatible with Ruthenium pellets for e-beam evaporation?
The product description specifies compatibility with graphite, Al2O3 (alumina), BN (boron nitride), or Ta (tantalum) liners when using a water-cooled copper e-beam hearth. Selecting an appropriate liner is critical to avoid chemical reaction or contamination at ruthenium's high melting point of 2,310°C.
How does the high melting point of ruthenium (2,310°C) affect the choice of evaporation source and hardware?
The melting point of 2,310°C necessitates e-beam evaporation as the preferred method because it can achieve the required temperatures without crucible contamination. A water-cooled copper hearth is recommended to prevent thermal damage, and compatible liners (graphite, Al2O3, BN, or Ta) must be used to withstand the extreme heat while maintaining material purity.
This ruthenium evaporation material (99.95% purity, 1-3 mm pellets) is suited for e-beam deposition with specified liner compatibility, but requires careful process matching due to its high melting point and density.
Positive
- High-purity ruthenium pellets: 99.95% purity and defined pellet size (1-3 mm) ensure consistent material identity for reproducible thin-film deposition.
- E-beam evaporation compatibility: Compatible with water-cooled copper e-beam hearth and multiple liner materials (graphite, Al2O3, BN, Ta), supporting standard deposition hardware.
Trade-offs
- High melting point requires specific hardware: Melting point of 2,310°C demands e-beam evaporation and may limit compatibility with lower-temperature evaporation sources or crucibles.
- Pre-quotation validation needed: Buyers must confirm source geometry, pack size, certificate requirements, and shipment conditions before ordering to ensure laboratory readiness.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
