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Indium(I)Oxide (In2O) Evaporation Material, Powder, 99.996%, 18-68 nm
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This indium(I) oxide evaporation material requires specific deposition source liner compatibility and method preference. The powder form and melting point impose constraints on deposition process parameters and hardware matching.
- Evaporation Source Liner Compatibility: The material is compatible with graphite, Al2O3, or BN liners for E-beam evaporation, and with W, Mo, or Ta boats for thermal evaporation.
- Evaporation Method Constraint: E-beam evaporation is the preferred method, while thermal evaporation requires RFQ confirmation for suitability.
- Melting Point Consideration: The melting point of approximately 600°C must be incorporated into the deposition process parameter planning.
- Deposition Hardware Matching: Deposition source hardware and process route must be matched to the material's behavior and melting point to achieve required film properties.
What is the impact of the 18–68 nm particle size distribution on the evaporation behavior of In₂O powder in E-beam deposition?
The 18–68 nm particle size range ensures uniform loading and controlled evaporation; the narrow distribution minimizes spit and non-uniform film thickness. The product description explicitly states that the sizing supports 'source loading and evaporation review' for thin-film deposition workflows.
Which liner or boat materials are recommended for E-beam evaporation of In₂O to avoid chemical reaction or contamination?
Graphite, Al₂O₃, or BN liners are suitable for E-beam hearths, and W, Mo, or Ta boats can be used for thermal evaporation by RFQ. The product specification lists these materials as compatible hardware for the evaporation source.
What is the melting point of In₂O and how does it affect the choice of evaporation method?
The melting point is approximately 600°C, which makes E-beam evaporation the preferred method due to localized heating; thermal evaporation may require RFQ for proper boat selection. The product description lists both the melting point and the recommended evaporation methods.
Indium(I)Oxide (In2O) evaporation material in powder form with 99.996% purity and 18-68 nm particle size is suitable for high-purity thin-film deposition by E-beam evaporation, though thermal evaporation requires RFQ and specific liner materials.
Positive
- High 99.996% purity: Minimizes contamination in deposited thin films, supporting consistent electrical and optical properties in sensitive applications.
- Controlled 18-68 nm particle size: Narrow size distribution promotes uniform evaporation rates and reproducible film thickness across the substrate.
Trade-offs
- Restricted evaporation hardware compatibility: E-beam evaporation is preferred; thermal evaporation requires RFQ and specific liner materials (graphite/Al2O3/BN or W/Mo/Ta boat), limiting deposition system flexibility.
- Process sensitivity due to melting point and density: Melting point ~600°C and density 6.99 g/cm³ may necessitate careful thermal management to avoid decomposition or source wetting, especially in E-beam systems.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).






