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Tantalum Oxide (Ta2O5) Evaporation Material, Tablet, 99.99%, Tablet 6 mm
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This material is a 99.99% pure Ta2O5 tablet designed for e-beam evaporation in thin-film deposition. Processing requires matching the evaporation source hardware to the material's melting point, density, and Z-ratio for optimal film quality.
- Evaporation Source Compatibility: Use an e-beam hearth with graphite, Al2O3, or BN liner, or a W/Mo/Ta boat for deposition.
- Melting Point Constraint: The melting point of 1,872°C demands sufficient power density from the e-beam source to achieve full evaporation.
- Z-Ratio Influence: The Z-ratio of 0.3 requires calibration of quartz crystal monitors to account for acoustic impedance mismatch.
- Physical Form for Loading: The tablet diameter of 6 mm must fit the pocket dimensions of the chosen e-beam hearth or boat.
- Deposition Method Preference: E-beam evaporation is the preferred method; thermal evaporation is available only by special request.
What is the recommended evaporation method for Tantalum Oxide (Ta2O5) tablets, and what liner materials should be used?
E-beam evaporation is the preferred method for Tantalum Oxide tablets, with good performance achieved using an e-beam hearth with a graphite, Al2O3, or BN liner, or a W/Mo/Ta boat. Thermal evaporation is available by RFQ. The liner or boat material must be compatible with the high melting point of 1,872°C and density of 8.2 g/cm³.
What deposition source hardware is compatible with Atomfair Tantalum Oxide (Ta2O5) tablets?
The tablets are designed for use in e-beam evaporation sources with liners made of graphite, Al2O3, or BN, or boats made of W, Mo, or Ta. The product datasheet also lists sheet2 hardware options including Tantalum, Ta, W, W, and VitC. Buyers must confirm deposition-source geometry and compatibility before ordering.
What documentation is available for Tantalum Oxide (Ta2O5) evaporation material to support laboratory safety and compliance?
Atomfair provides a certificate of analysis, safety data sheet, and shipment condition documentation for this product. Export requirements can also be reviewed upon request. These documents support laboratory safety review and compliance with institutional procurement policies.
Tantalum Oxide (Ta2O5) evaporation material in 6 mm tablet form at 99.99% purity is evaluated for E-beam evaporation with good performance using graphite/Al2O3/BN liners or W/Mo/Ta boats; thermal evaporation requires RFQ. The high density (8.2 g/cm³) and melting point (1,872 °C) with a Z-ratio of 0.3 indicate stable deposition behavior but demand careful source matching and liner selection to avoid contamination.
Positive
- High-purity 99.99% Ta2O5 tablet: The 99.99% purity specification supports consistent film stoichiometry and minimizes impurity-driven defects in optical or dielectric thin-film applications.
- Good E-beam evaporation performance: Rated as 'Good' for E-beam evaporation with compatible hearth liners (graphite, Al2O3, BN) or refractory metal boats, enabling reliable deposition rates for research-scale coating runs.
Trade-offs
- Thermal evaporation requires RFQ: Thermal evaporation is not standard and must be requested via RFQ, limiting process flexibility for labs without E-beam capability or requiring alternative deposition methods.
- Source hardware compatibility critical: Optimal performance depends on using specific liner materials (graphite, Al2O3, BN) or boats (W, Mo, Ta); incorrect source selection may cause contamination or poor film adhesion.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).






