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Tantalum Oxide (Ta2O5) Evaporation Material, Tablet, 99.95%, Tablet 6 mm
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This tantalum oxide evaporation material requires E-beam evaporation with a graphite, Al2O3, or BN liner or a W/Mo/Ta boat for optimal deposition performance. The tableted form's melting point, density, and Z-ratio must be considered during source setup and film thickness monitoring.
- Evaporation Source Compatibility: Use E-beam evaporation with a graphite, Al2O3, or BN liner or a W/Mo/Ta boat to avoid material contamination and ensure proper vaporization.
- Preferred Evaporation Method: E-beam evaporation is the preferred method; thermal evaporation is available only by request and may require source hardware adjustments.
- Melting Point Consideration: The melting point of 1,872°C requires sufficient power capacity in the evaporation source to achieve full vaporization without overheating.
- Z-Ratio Effect on Thickness Monitoring: The Z-ratio of 0.3 must be entered into the quartz crystal microbalance controller for accurate film thickness deposition rate measurement.
- Physical Form Matching: The 6 mm tablet diameter must be compatible with the crucible or boat cavity dimensions to ensure stable loading and even heating.
How does the Z-Ratio of 0.3 affect process control during Ta2O5 evaporation?
The Z-Ratio of 0.3 is used for quartz crystal microbalance (QCM) calibration to correct for acoustic impedance mismatch between the crystal and the deposited material. A lower Z-Ratio, such as 0.3, indicates a higher mismatch, requiring a larger tooling factor adjustment to maintain accurate thickness monitoring. The product's density of 8.2 g/cc and melting point of 1,872°C further influence evaporation rate and film stoichiometry, so the QCM parameters must be set accordingly for reproducible thin-film deposition.
Can Ta2O5 tablets be used in thermal evaporation boats, or only E-beam hearths?
E-beam evaporation is the preferred method for these Ta2O5 tablets, with performance rated as Good. Thermal evaporation is possible but requires a request for quotation (RFQ) to evaluate compatibility with available boat materials such as W, Mo, or Ta. The high melting point of 1,872°C and the 6 mm tablet form may necessitate specialized thermal sources or crucible liners, so users should confirm deposition-source geometry and hardware before ordering.
What are the recommended storage and handling practices for Ta2O5 evaporation material to maintain 99.95% purity?
The product listing recommends reviewing the safety data sheet (SDS) and confirming shipment conditions for handling guidelines. As a high-purity metal oxide, standard precautions for fine powders apply: store in a dry, sealed container to prevent moisture absorption and avoid contamination. The 99.95% purity grade requires careful handling in a clean laboratory environment, and buyers should consult the provided documentation for export requirements and storage instructions.
Tantalum Oxide (Ta2O5) evaporation material in 6 mm tablet form at 99.95% purity is evaluated for E-beam evaporation with good performance, requiring specific liner or boat materials (graphite/Al2O3/BN or W/Mo/Ta) and a melting point of 1,872°C with density 8.2 g/cm³ and Z-ratio 0.3, which influences deposition rate monitoring.
Positive
- High-purity 99.95% Ta2O5 tablet: The 99.95% purity specification supports consistent thin-film stoichiometry and reduces contamination risk in optical or dielectric layer deposition.
- Defined 6 mm tablet form factor: The 6 mm tablet size is compatible with standard E-beam hearths and boat sources, enabling reproducible loading and evaporation in vacuum systems.
Trade-offs
- E-beam evaporation preferred method: Thermal evaporation requires RFQ confirmation, limiting direct process flexibility; users must verify source compatibility with graphite/Al2O3/BN liners or W/Mo/Ta boats.
- Z-ratio of 0.3 affects rate control: The low Z-ratio of 0.3 necessitates careful calibration of quartz crystal microbalance (QCM) monitors to avoid film thickness errors during deposition.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).






