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Tantalum Nitride (TaN) Evaporation Material, Pellets, 99.9%, 150 µm
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This evaporation material requires e-beam evaporation with a compatible liner or high-temperature crucible for thermal processing. Proper deposition-source geometry matching and confirmation of material behavior with the melting point and film requirements are necessary before use.
- Evaporation Method Constraint: E-beam evaporation is the preferred method, and thermal feasibility requires a request for quotation.
- Source Hardware Constraint: Use an e-beam hearth with a compatible liner; for thermal evaporation, a high-temperature crucible is required.
- Material Property Influence: The melting point of 3360 °C and Z-ratio of 1.00 influence evaporation rate and film stoichiometry control.
- Physical Form Constraint: The 150 µm pellet size must be compatible with the source loading geometry and evaporation dynamics.
- Process Matching Requirement: Deposition-source hardware and process route must be matched to the material behavior, melting point, and target film requirements.
Is thermal evaporation feasible for TaN pellets, or is e-beam the only recommended method?
E-beam evaporation is the preferred method for TaN pellets. Thermal evaporation is not recommended by default due to the high melting point of 3,360°C; feasibility must be evaluated via RFQ to ensure compatibility with crucible materials and thermal source capabilities.
What does a Z-ratio of 1.00 mean for TaN evaporation process control?
The Z-ratio of 1.00 indicates that the acoustic impedance of TaN matches the standard quartz crystal monitor calibration, simplifying thickness monitoring without needing a tooling factor adjustment. This is explicitly stated in the product specifications.
What particle size and purity considerations are critical when loading TaN pellets into an e-beam hearth?
The TaN pellets are supplied as 150 µm particles, which are suitable for uniform loading in e-beam hearths. The 99.9% purity specification ensures minimal contamination, but buyers should confirm deposition source geometry and liner compatibility, as the material's high density (16.3 g/cm³) and melting point (3,360°C) require a high-temperature crucible or compatible liner, available by RFQ.
Tantalum Nitride (TaN) pellets at 99.9% purity and 150 µm size are evaluated for E-beam evaporation deposition, with a high melting point of 3,360 °C and density of 16.3 g/cm³ requiring compatible hearth liners and high-temperature crucibles by RFQ.
Positive
- High-purity 99.9% TaN pellets: The 99.9% purity specification supports consistent thin-film stoichiometry and reduces contamination risk in vacuum deposition processes.
- Defined pellet size for source loading: The 150 µm pellet form factor facilitates controlled feeding and uniform evaporation in E-beam hearth systems, improving process reproducibility.
Trade-offs
- E-beam evaporation preferred; thermal limited: Thermal evaporation feasibility requires RFQ confirmation, and the material is primarily designed for E-beam hearths with compatible liners, restricting deposition method flexibility.
- High melting point requires specialized hardware: With a melting point of 3,360 °C and density of 16.3 g/cm³, high-temperature crucibles and compatible hearth liners are necessary, adding infrastructure and procurement lead time.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
