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Silicon(II)Oxide (SiO) Evaporation Material, Pieces, 99.99%, 1-3 mm
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This evaporation material requires E-beam deposition with specific liner or boat materials for optimal performance. Users must confirm deposition source compatibility and enter the Z-ratio of 0.87 into the quartz crystal monitor for accurate film thickness control.
- E-beam Evaporation Source Compatibility: Use an E-beam hearth with graphite, Al2O3, or BN liner, or a W/Mo/Ta boat for evaporation.
- Thermal Evaporation Requirement: Thermal evaporation is possible only by RFQ and may yield different performance.
- E-beam Performance Rating: E-beam performance is rated as Fair, indicating moderate suitability for thin-film deposition.
- Melting Point and Density Influence: The melting point above 1702°C and density of 2.13 g/cm³ affect evaporation rate and film properties.
- Z-Ratio Calibration: Set the Z-ratio to 0.87 in the deposition controller to ensure accurate thickness monitoring.
Why is the E-beam evaporation performance rated as 'Fair' for SiO pieces, and when should thermal evaporation by RFQ be considered instead?
The E-beam evaporation performance is rated as 'Fair' because SiO has a high melting point (>1702°C) and density of 2.13 g/cm³, requiring careful liner selection (graphite, Al2O3, or BN) or W/Mo/Ta boats to avoid contamination and achieve stable evaporation. Thermal evaporation by RFQ is recommended when better control of stoichiometry or lower vapor pressure operation is needed, as the material's behavior under direct thermal heating may differ from electron beam impact.
What liner or boat materials are compatible with evaporating SiO pieces from this product?
For E-beam evaporation, the SiO pieces should be placed in a hearth lined with graphite, Al2O3, or BN, or alternatively in a tungsten, molybdenum, or tantalum boat. For thermal evaporation via RFQ, tungsten or tantalum boats are specified. These materials are selected to withstand the high melting point of SiO and minimize chemical reaction with the crucible.
How does the 1-3 mm particle size and Z-ratio of 0.87 affect deposition process control for SiO thin films?
The 1-3 mm pieces are sized to fit standard E-beam hearths and boats, enabling consistent loading and evaporation. The Z-ratio of 0.87 must be entered into the quartz crystal microbalance (QCM) controller to correct for the acoustic impedance of SiO relative to the quartz crystal, ensuring accurate film thickness monitoring during deposition.
Silicon(II) Oxide (SiO) evaporation material in 1-3 mm pieces at 99.99% purity is evaluated for e-beam evaporation with fair performance using graphite/Al2O3/BN liners or W/Mo/Ta boats; thermal evaporation requires RFQ. The high melting point (>1702°C) and low density (2.13 g/cm³) impose specific source compatibility and process control requirements.
Positive
- High purity for consistent deposition: 99.99% purity minimizes contamination in thin films, supporting reproducible optical or dielectric layer properties in vacuum deposition.
- Defined particle size for source loading: 1-3 mm pieces facilitate uniform feeding and controlled evaporation rates in e-beam or thermal boat sources, reducing process variability.
Trade-offs
- Fair e-beam performance requires liner: E-beam evaporation performance is rated as fair, necessitating a graphite, Al2O3, or BN liner or W/Mo/Ta boat to avoid source damage and achieve stable rates.
- Thermal evaporation requires RFQ: Thermal evaporation is not standard and requires a request for quotation, indicating potential process compatibility or hardware constraints that must be assessed before ordering.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).





