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Hafnium Oxide (HfO2) Evaporation Material, Pieces, 99.99%, 55-75 nm
Product Type: Compound Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This material requires specific evaporation source hardware and process matching to achieve optimal film deposition. The material's melting point, density, and Z-ratio must be considered for source loading and evaporation rate control.
- Evaporation Method Preference: E-beam evaporation is preferred due to fair performance; thermal evaporation is available only by RFQ.
- Crucible and Liner Requirement: Use an E-beam hearth with a graphite, Al2O3, or BN liner, or a boat made of W, Mo, or Ta.
- Thermal Property Constraints: The material's melting point of 2,758°C, density of 9.68 g/cm³, and Z-ratio of 1.00 influence deposition rate and film thickness.
- Source-Process Matching: Evaporation source hardware and process route must be matched to the material's behavior, melting point, and film requirements.
- Pre-Order Compatibility Verification: Confirm model, purity, form, size range, pack size, and deposition-source compatibility before quotation.
What is the recommended evaporation method for HfO₂ pieces, and under what conditions is thermal evaporation acceptable?
E-beam evaporation is the preferred method for HfO₂ pieces, with thermal evaporation available only by RFQ. The product specification rates e-beam performance as 'Fair' when using a hearth with graphite, Al₂O₃, or BN liner, or a W/Mo/Ta boat. Thermal evaporation may require custom process development and is not the standard recommended route.
Which crucible liner or boat materials are compatible with HfO₂ evaporation to avoid contamination or reaction?
For e-beam evaporation, compatible liners include graphite, aluminum oxide (Al₂O₃), and boron nitride (BN). For boats, tungsten (W), molybdenum (Mo), and tantalum (Ta) are explicitly listed as compatible materials. These choices are specified in the product documentation to ensure chemical stability during deposition.
What are the density (9.68 g/cm³) and Z-ratio (1.00) of HfO₂, and how do these parameters affect quartz crystal microbalance deposition monitoring?
HfO₂ has a density of 9.68 g/cm³ and a Z-ratio of 1.00. A Z-ratio of 1.00 indicates ideal acoustic impedance matching, simplifying QCM calibration and thickness monitoring. The density value is essential for converting frequency shift to film thickness, so accurate input ensures precise deposition control.
Hafnium Oxide (HfO2) evaporation material in pieces form at 99.99% purity and 55-75 nm size range is specified for E-beam evaporation with fair performance, requiring careful matching of source hardware (graphite/Al2O3/BN liner or W/Mo/Ta boat) and process route due to its high melting point (2,758°C) and density (9.68).
Positive
- High purity and defined form: 99.99% purity and 55-75 nm pieces ensure consistent stoichiometry and predictable source loading for thin-film deposition.
- Explicit source compatibility: Evaporation hardware guidance (E-beam with graphite/Al2O3/BN liner or W/Mo/Ta boat) reduces trial-and-error for lab integration.
Trade-offs
- Fair E-beam performance: E-beam evaporation performance is rated as 'Fair', indicating potential suboptimal film quality or process stability compared to higher-rated materials.
- High temperature and density constraints: Melting point of 2,758°C and density of 9.68 require dedicated high-power source hardware and careful thermal management, limiting compatibility with standard thermal evaporation setups.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
