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Ruthenium (Ru) Evaporation Material, Pieces, 99.99%, 1-3 mm
Product Type: Pure Metal Evaporation Material
Research-grade laboratory product
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LABORATORY PROCUREMENT SUPPORT
For material selection, deposition-source matching, pack-size confirmation or quotation support, contact our technical sales team.
INQUIRY: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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Requires e-beam evaporation using a water-cooled copper hearth with compatible liner materials. The high melting point (2310°C) and Z-ratio (0.182) must be accounted for in deposition parameters and thickness monitoring.
- Liner Compatibility: Use graphite, Al2O3, BN, or Ta liners for the e-beam hearth to avoid contamination.
- Source Geometry Confirmation: Confirm that the deposition source geometry matches the piece size (1-3 mm) for uniform loading.
- Process Matching: Match the evaporation process route to the material's melting point and target film properties.
- Power Requirements: Account for the high melting point when setting e-beam power to achieve consistent evaporation rates.
- Thickness Monitoring: Use the specified Z-ratio for accurate quartz crystal microbalance thickness monitoring.
What hearth liner material is recommended for Ruthenium evaporation pieces to avoid contamination and ensure uniform deposition?
For Ruthenium evaporation pieces (99.99%, 1-3 mm), the preferred evaporation method is e-beam using a water-cooled copper hearth, with compatible liners including graphite, Al2O3, BN, or Ta. The choice of liner depends on the specific deposition system and the need to avoid contamination at the material's high melting point of 2,310°C.
Can Ruthenium evaporation pieces be used in thermal evaporation systems, or are they strictly intended for e-beam evaporation?
The product is primarily intended for e-beam evaporation, as indicated by the preferred use of a water-cooled copper e-beam hearth. However, the compatible liners listed (graphite, Al2O3, BN, Ta) suggest that thermal evaporation may be possible with appropriate crucible selection, though buyers should confirm compatibility with their specific deposition system and the material's high melting point of 2,310°C.
What critical parameters should be considered for handling Ruthenium evaporation pieces given its high melting point and density?
Ruthenium has a melting point of 2,310°C and a density of 12.3 g/cm³, requiring robust e-beam or thermal source capability to achieve evaporation. The Z-ratio of 0.182 is essential for accurate quartz crystal microbalance thickness monitoring. The 1-3 mm piece size is designed for consistent source loading, and buyers should verify that their deposition source geometry and power supply can handle the material's high thermal load.
Atomfair Ruthenium (Ru) evaporation material (99.99%, 1-3 mm pieces) is a high-purity metal source for e-beam deposition, requiring compatible water-cooled copper hearth hardware and pre-purchase verification of parameters.
Positive
- High purity 99.99% for consistent deposition: The 99.99% purity specification minimizes contaminant incorporation, supporting reproducible thin-film properties in vacuum deposition processes.
- Compatible with e-beam evaporation hardware: The 1-3 mm pieces are designed for water-cooled copper e-beam hearths with compatible liners (graphite, Al2O3, BN, Ta), facilitating direct integration into standard evaporation systems.
Trade-offs
- Requires specific e-beam evaporation infrastructure: This material is optimized for e-beam evaporation with water-cooled copper hearth and compatible liners; alternative deposition methods may not achieve the same performance or require additional process development.
- Pre-purchase compatibility verification needed: Buyers must confirm model, purity, form, size range, pack size, and deposition-source compatibility before quotation, as mismatches could affect process outcomes.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
