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Multi-Channel Mass-Flow Gas Control Module

Multi-Channel Mass-Flow Gas Control Module

$5,800.00

Institutional Procurement & Supply Compliance: As a verified US supplier, Atomfair accepts formal institutional Purchase Orders (POs), contract billing schedules, and custom procurement loops for university and national laboratories, and corporate R&D departments globally.

Multi-Channel Mass-Flow Gas Control Module is a gas control and flow-metering module for metered gas supply, flow balancing and gas-path configuration in tube furnace, CVD and PECVD workflows. Key configuration points include gas control system with 5 MFC; Gas supply system.

SKU: AF-VS-V-0000-74R8-002A
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Multi-Channel Mass-Flow Gas Control Module
LABORATORY THERMAL PROCESSING EQUIPMENT
Product Overview

Multi-Channel Mass-Flow Gas Control Module is a gas control and flow-metering module for metered gas supply, flow balancing and gas-path configuration in tube furnace, CVD and PECVD workflows.

The configuration focuses on gas control system with 5 MFC.

Additional configuration points include Gas supply system.
Technical Specifications
Parameter Specification / Available Values
Atomfair Model VS-0000-2A
Product Family gas control and flow-metering module
Configuration Focus gas control system with 5 MFC.
Process Fit metered gas supply, flow balancing and gas-path configuration in tube furnace, CVD and PECVD workflows
Quotation Confirmation Confirm temperature class, tube or chamber size, heating-zone layout, gas/vacuum package, power supply and required accessories.
Configuration Highlights
  • gas control system with 5 MFC.
  • Gas supply system.
  • The gas supply system can control the mixing of three gases at different flow rates. It can also be equipped with a scrubbing device according to the experimental needs. The mass flow meter is installed in a sealed movable cabinet. It is made of ultra-clean double-throw stainless steel tubes. It is composed of precision double ferrule joints. This equipment forms a CVD system with various vacuum tube furnaces and vacuum units of brand.
  • sccm，100sccm，200sccm，200sccm，500sccm Nitrogen calibration, range optional.
  • ~0.15 MPa 0.01 MPa/grid.
APPLICATION SCOPE: metered gas supply, flow balancing and gas-path configuration in tube furnace, CVD and PECVD workflows.
PACKAGING: The equipment is prepared with protective inner materials and reinforced outer packaging for handling, storage and delivery.
IMPORTANT NOTICE: Please confirm temperature class, usable process size, gas/vacuum package, power supply and accessory configuration before quotation.
LABORATORY PROCUREMENT SUPPORT
For model selection, configuration matching, power supply confirmation or quotation review, contact our technical sales team.
E-MAIL: inquiry@atomfair.com
Manufacturer: Atomfair LLC
Brand: ATOMFAIR®

Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.

To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.

Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).

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