Atomfair Semiconductor Glove Box – Vacuum Heating Adsorption, FFU Class 100 Clean System, H₂O&O₂ < 0.1ppm Dust-Free Chamber

Atomfair Clean Operation Chamber features excellent sealing performance (pressure change ≤ 132 Pa/hour), integrated with an FFU clean air system and a vacuum heating adsorption platform. It serves as a highly reliable operating equipment for precision material preparation and microelectronics research.

Description

 

Atomfair Clean Operation Chamber – Product Introduction

(Suitable for Scientific Research Scenarios such as Precision Material Preparation and Microelectronic Device Assembly)

Sealing Performance Test Results

No. Test Item Unit Test Index Test Result Individual Judgment
1 Sealing Performance Pa Pressure Pressure Change: 107 Pa per hour Qualified
2 Sealing Performance Pa Pressure Pressure Change: 115 Pa per hour Qualified
3 Sealing Performance Pa Pressure Pressure Change: 121 Pa per hour Qualified
4 Sealing Performance Pa Pressure Pressure Change: 103 Pa per hour Qualified
5 Sealing Performance Pa Pressure Pressure Change: 119 Pa per hour Qualified
6 Sealing Performance Pa Pressure Pressure Change: 132 Pa per hour Qualified

Core Configurations & Features

FFU Clean Air System

Built-in Fan Filter Unit (FFU) continuously circulates and purifies the air inside the chamber, efficiently trapping particles and other contaminants. It ensures the cleanliness of the operating environment, suitable for scientific research scenarios requiring high environmental cleanliness such as precision material synthesis and microelectronic device assembly.

Vacuum Heating Adsorption Platform

Integrates vacuum adsorption and heating functions, enabling stable sample fixation and precise temperature control. It is suitable for experimental operations requiring accurate temperature control and sample fixation, such as thin film preparation and device packaging.

 

If you’re interested, have any questions, or have specific customization requirements, please feel free to contact us at inquiry@atomfair.com.