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Multi-Channel Mass-Flow Gas Control Module
LABORATORY THERMAL PROCESSING EQUIPMENT
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LABORATORY PROCUREMENT SUPPORT
For model selection, configuration matching, power supply confirmation or quotation review, contact our technical sales team.
E-MAIL: inquiry@atomfair.com
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Manufacturer: Atomfair LLC
Brand: ATOMFAIR®
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This gas control module requires integration with a compatible furnace system and confirmation of temperature class, process size, and gas/vacuum package. The mass flow controllers are factory-calibrated for nitrogen and must be recalibrated for alternative process gases.
- System Integration: Confirm the module's temperature class, tube or chamber size, and gas/vacuum package match the furnace system specifications.
- Pressure Limit: The inlet pressure must not exceed 0.15 MPa to ensure safe operation of the mass flow controllers.
- Calibration: The mass flow controllers are calibrated for nitrogen; recalibration is required for other process gases.
- Leak Testing: Perform a leak check on all gas connections before powering the module.
This procedure describes the safe initialization of the gas control module for metered gas supply in a tube furnace system. Follow these steps to ensure correct configuration and leak-free operation.
Required Equipment: Leak detection device, Gas supply lines with compatible fittings, Furnace system interface
- Inspect Module
Inspect the module for any shipping damage or loose connections before installation. - Connect Gas Lines
Connect the process gas supply lines to the inlet ports using ultra-clean stainless steel tubing and double ferrule fittings. - Configure Flow Rates
Set the mass flow controller setpoints for each channel according to the required gas flow rates for the process. - Leak Test
Perform a leak test on all connections using a suitable leak detection device before initiating gas flow.
What MFC flow-rate configurations are available for the Atomfair VS-0000-2A multi-channel gas control module?
The module is configured with five MFCs; the listed flow ranges are 'sccm', 100 sccm, 200 sccm, 200 sccm, and 500 sccm with nitrogen calibration, and the range is optional. These ranges support metered gas supply and flow balancing in tube furnace, CVD, and PECVD workflows.
Can the VS-0000-2A be integrated with a tube furnace or vacuum system for CVD/PECVD?
Yes; the equipment is intended to form a CVD system with various vacuum tube furnaces and vacuum units and is specified for metered gas supply, flow balancing, and gas-path configuration in tube furnace, CVD, and PECVD workflows. The gas supply system can control mixing of three gases at different flow rates and can be equipped with a scrubbing device according to experimental needs.
What configuration and utility details must be confirmed before installing the VS-0000-2A gas control module?
Before quotation you must confirm temperature class, tube or chamber size, heating-zone layout, gas/vacuum package, power supply, and required accessories. The mass flow meter is installed in a sealed movable cabinet made of ultra-clean double-throw stainless steel tubes with precision double ferrule joints; protective inner materials and reinforced outer packaging are provided for handling, storage, and delivery.
This five-MFC gas control module enables metered mixing of up to three gases for tube furnace, CVD, and PECVD systems, using an ultra-clean stainless-steel gas path in a sealed cabinet; it requires pre-order confirmation of flow ranges, gas/vacuum package, power supply, and process size.
Positive
- Five-channel MFC gas mixing: Five mass flow controllers allow controlled mixing of up to three gases at different flow rates, enabling flow balancing and metered gas supply for tube furnace, CVD, and PECVD process recipes.
- Clean stainless-steel gas path: The sealed movable cabinet integrates ultra-clean double-throw stainless steel tubing and precision double ferrule joints, reducing particulate contamination and leak points in the gas delivery path.
Trade-offs
- Pre-installation configuration confirmation required: Temperature class, usable process size, gas/vacuum package, power supply, and accessory configuration must be confirmed before quotation, meaning the module is not a drop-in device and requires system-level engineering matching.
- Flow range selected at order time: The MFC ranges are optional and nitrogen-calibrated (e.g., sccm, 100 sccm, 200 sccm, 200 sccm, 500 sccm), so the user must specify the appropriate ranges for the intended gas flows during configuration rather than after delivery.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD excl. heavy equipment). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
