Description
Ultra-high purity (99.9999% or 6N) intrinsic silicon sputtering targets available in P-type, N-type, and undoped variants. Precision-engineered for thin film deposition applications with multiple diameter and thickness options. Ideal for semiconductor, photovoltaic, and research applications requiring controlled resistivity.
| Type | Diameter (mm) | Thickness (mm) | Resistivity | Package |
|---|---|---|---|---|
| P-Type Silicon | 50.8 | 3 | <0.0001 Ω·cm | 1 pc per pack |
| 50.8 | 4 | <0.0001 Ω·cm | ||
| 50.8 | 5 | <0.0001 Ω·cm | ||
| 50.8 | 6 | <0.0001 Ω·cm | ||
| P-Type Silicon | 50.8 | 3 | 1-10 Ω·cm | |
| 50.8 | 4 | 1-10 Ω·cm | ||
| 50.8 | 5 | 1-10 Ω·cm | ||
| 50.8 | 6 | 1-10 Ω·cm | ||
| N-Type Silicon | 50.8 | 3 | <0.0001 Ω·cm | |
| 50.8 | 4 | <0.0001 Ω·cm | ||
| 50.8 | 5 | <0.0001 Ω·cm | ||
| 50.8 | 6 | <0.0001 Ω·cm | ||
| N-Type Silicon | 50.8 | 3 | 1-10 Ω·cm | |
| 50.8 | 4 | 1-10 Ω·cm | ||
| 50.8 | 5 | 1-10 Ω·cm | ||
| 50.8 | 6 | 1-10 Ω·cm | ||
| Intrinsic Silicon | 50.8 | 3 | – | |
| 50.8 | 4 | – | ||
| 50.8 | 5 | – | ||
| 50.8 | 6 | – | ||
| 60 | 3 | – | ||
| 60 | 4 | – | ||
| 60 | 5 | – | ||
| 60 | 6 | – | ||
| Intrinsic Silicon | 76.2 | 3 | – | |
| 76.2 | 4 | – | ||
| 76.2 | 5 | – | ||
| 76.2 | 6 | – | ||
| 76.2 | 3 | >30 Ω | ||
| 76.2 | 4 | >30 Ω | ||
| 76.2 | 5 | >30 Ω | ||
| 76.2 | 6 | >30 Ω |
If you are interested or have any questions, please contact us at inquiry@atomfair.com
Disclaimer: Sold exclusively for laboratory research.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).

