Description
Atomfair-FTM-638 Thin Film Thickness Meter
Product Overview
Atomfair-FTM-638 is a high-precision thin film measurement device jointly developed with an internationally renowned enterprise. Adopting advanced thin film thickness measurement technology and based on the principle of white light interference, it can accurately determine the thickness of thin films and optical constants (refractive index n, extinction coefficient k). By analyzing the reflection spectrum formed by the coherence of the reflected light from the thin film surface and the reflected light from the thin film-substrate interface, and through professional software fitting calculation, the key parameters of each layer of single-layer or multi-layer film systems can be efficiently obtained. The key components of the equipment are all imported internationally, and the whole machine import solution can also be provided according to customer needs, which is suitable for various precision measurement scenarios of thin films and coatings.
Key Technical Specifications (International Standard)
| No. | Parameter Name | Specific Specifications |
| 1 | Thickness Measurement Range | Film thickness only: 20nm-50μm; Simultaneous measurement of film thickness and optical constants (n,k): 100nm-10μm (slightly different according to the type of thin film material) |
| 2 | Measurement Accuracy | <1nm or <0.5% |
| 3 | Measurement Repeatability | 0.1nm |
| 4 | Wavelength Range | 380nm-1000nm |
| 5 | Measurable Film Layers | 1-4 layers |
| 6 | Sample Size Requirement | Diameter of sample coating area >1.2mm |
| 7 | Measurement Speed | 5s-60s |
| 8 | Spot Diameter | 1.2mm-10mm (adjustable) |
| 9 | Sample Stage Specification | 290mm×160mm |
| 10 | Light Source Configuration | Long-life bromine-tungsten lamp (service life: 2000h) |
| 11 | Optical Fiber Type | Pure quartz wide-spectrum optical fiber |
| 12 | Detector | Imported fiber optic spectrometer |
| 13 | Power Supply Requirement | AC100V-240V, 50HZ-60HZ |
| 14 | Equipment Weight | 18kg |
| 15 | Equipment Dimension | 300mm×300mm×350mm |
Software Function Advantages
User-Friendly Operation: The interface is friendly and intuitive. Users can complete the measurement process with simple clicks without complex professional training.
Efficient Data Processing: Supports fast saving and reading of reflection spectrum data, with powerful data processing capability. A single measurement can simultaneously obtain core data such as the thickness and optical constants of up to 4 layers of thin films.
Rich Material Library: Built-in a large number of optical constant data of conventional materials. Users can conveniently expand the custom material database according to actual needs to adapt to more special measurement scenarios.
Application Scope & Compatible Materials
Application Scenarios
Suitable for the thickness measurement of various thin films and coatings such as dielectrics, semiconductors, thin film filters, and liquid crystals.
Typical Compatible Materials
Thin Film Materials: SiO₂, CaF₂, MgF, photoresist, polycrystalline silicon, amorphous silicon, SiNₓ, TiO₂, polyimide, polymer film, etc.
Substrate Materials: SiGe, GaAs, ZnS, ZnSe, aluminum acrylic acid, sapphire, glass, polycarbonate, polymer, quartz, etc.
Product Design Highlights
Adopting an open structure design, the optical fiber probe can be easily taken out. Through the supporting optical fiber adapter, it can be connected to a microscope with a C-mount interface (microscope needs to be configured separately) to realize the precise measurement of micro-area (>10μm, the specific range is related to the microscope magnification) thin film thickness, adapting to more refined measurement needs.
If you’re interested, have any questions, or have specific customization requirements, please feel free to contact us at inquiry@atomfair.com.
