Atomfair 10*10mm Silicon Carbide (SiC) Substrate

A square 10*10mm SiC substrate available in industrial, research, and dummy grades. Suitable for high-performance optoelectronic and power device applications. Offers excellent thermal and electrical properties.

Description

Parameter	Industrial Grade (P Grade)	Research Grade (R Grade)	Dummy Grade (D Grade)
Dimensions	10*10mm±0.2mm	10*10mm±0.2mm	10*10mm±0.2mm
Thickness	350um±25 um	350um±25 um	350um±25 um
Wafer Orientation	Off axis: 2.0°-4.0° toward [1120] ±0.5° (4H/6H-P), On axis:(111)±0.5° (3C-N)	Off axis: 2.0°-4.0° toward [1120] ±0.5° (4H/6H-P), On axis:(111)±0.5° (3C-N)	Off axis: 2.0°-4.0° toward [1120] ±0.5° (4H/6H-P), On axis:(111)±0.5° (3C-N)
Micropipe Density	0cm²	0cm²	0cm²
Resistivity (4H/6H-P)	≤0.10Ω·cm	≤0.10Ω·cm	≤0.10Ω·cm
Resistivity (3C-N)	≤0.8mΩ·cm	≤0.8mΩ·cm	≤0.8mΩ·cm
Primary Flat Orientation (4H/6H-P)	{10-10}±5.0°	{10-10}±5.0°	{10-10}±5.0°
Primary Flat Orientation (3C-N)	{1-10}±5.0°	{1-10}±5.0°	{1-10}±5.0°
Primary Flat Length	15.9mm±1.7mm	15.9mm±1.7mm	15.9mm±1.7mm
Secondary Flat Length	8.0mm±1.7mm	8.0mm±1.7mm	8.0mm±1.7mm
Secondary Flat Orientation	90° CW from Prime flat ±5.0°	90° CW from Prime flat ±5.0°	90° CW from Prime flat ±5.0°
Edge Exclusion	3mm	3mm	3mm
TTV/Bow/Warp	≤2.5μm/≤5μm/≤15μm/≤30μm	≤2.5μm/≤5μm/≤15μm/≤30μm	≤2.5μm/≤5μm/≤15μm/≤30μm
Surface Roughness (Polish)	Ra≤1 nm	Ra≤1 nm	Ra≤1 nm
Surface Roughness (CMP)	Ra≤0.2 nm	Ra≤0.2 nm	Ra≤0.2 nm
Edge Cracks	None	1 allowed, ≤1 mm	None
Hex Plates	≤1% cumulative area	≤3% cumulative area	≤3% cumulative area
Polytype Areas	None	≤2% cumulative area	≤5% cumulative area
Si Surface Scratches	≤3 scratches, ≤1×wafer diameter cumulative length	≤5 scratches, ≤1×wafer diameter cumulative length	≤8 scratches, ≤1×wafer diameter cumulative length
Edge Chips	None	≤3 allowed, ≤0.5 mm each	≤5 allowed, ≤1 mm each
Si Surface Contamination	None	None	None
Packaging	Multi-wafer Cassette or Single Wafer Container	Multi-wafer Cassette or Single Wafer Container	Multi-wafer Cassette or Single Wafer Container

If you are interested or have any questions, please contact us at inquiry@atomfair.com

Disclaimer: Sold exclusively for laboratory research.

Atomfair

Atomfair 10*10mm Silicon Carbide (SiC) Substrate

Description

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