Description
This high-purity 99.99% (4N) zirconium oxide sputtering target is doped with 5.4% yttrium oxide (3 mol%) for enhanced stability and performance. Ideal for thin film deposition applications in semiconductor and optical coatings. Available in various diameters with optional copper backing for improved heat dissipation.
| Configuration | Diameter (mm) | Thickness (mm) | Backing | Packing |
|---|---|---|---|---|
| ZrO2 + 5.4% Y2O3 | 50.8 | 3 | None | 1 pc per pack |
| ZrO2 + 5.4% Y2O3 | 50.8 | 3 | 2mm Copper | 1 pc per pack |
| ZrO2 + 5.4% Y2O3 | 60 | 3 | None | 1 pc per pack |
| ZrO2 + 5.4% Y2O3 | 60 | 3 | 2mm Copper | 1 pc per pack |
| ZrO2 + 5.4% Y2O3 | 76.2 | 3 | None | 1 pc per pack |
| ZrO2 + 5.4% Y2O3 | 76.2 | 3 | 2mm Copper | 1 pc per pack |
If you are interested or have any questions, please contact us at inquiry@atomfair.com
Disclaimer: Sold exclusively for laboratory research.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).
