Via directed self-assembly of block copolymers, can we achieve sub-5nm semiconductor patterning?
block copolymers
self-assembly
semiconductor patterning
nanofabrication
lithography
Via self-assembled monolayer doping for ultra-efficient semiconductor devices
monolayer doping
semiconductors
nanotechnology
energy efficiency
material science
At terahertz oscillation frequencies for next-generation wireless communication beyond 6G networks
terahertz waves
6G networks
wireless communication
photonics
semiconductor devices
Via computational lithography optimizations for 3D stacked chiplet integration
EUV patterning
overlay error
inverse design
photoresist modeling
heterogeneous integration
Atomic layer etching techniques for defect reduction in 2nm semiconductor node fabrication
atomic layer etching
2nm nodes
semiconductor defects
chip fabrication
nanomanufacturing
EUV mask defect mitigation using reaction prediction transformers in semiconductor lithography
EUV lithography
mask defects
reaction prediction
transformers
semiconductor fabrication
Backside power delivery networks for 22nd century energy-efficient computing architectures
backside power delivery
energy-efficient computing
3D ICs
power networks
semiconductor design
Directed self-assembly of block copolymers for sub-5nm semiconductor patterning via microwave-assisted synthesis
directed self-assembly
block copolymers
semiconductor patterning
microwave synthesis
nanofabrication
Through EUV mask defect mitigation in next-generation semiconductor manufacturing
EUV lithography
mask defects
semiconductor manufacturing
nanofabrication
chip scaling
Enhancing quantum dot performance via atomic precision defect engineering in semiconductor lattices
quantum dots
defect engineering
semiconductors
optoelectronics
atomic precision
Enhancing semiconductor performance via self-assembled monolayer doping with atomic precision
self-assembled monolayers
semiconductor doping
atomic precision
nanoscale electronics
charge transport
Through hybrid bonding for chiplet integration in next-gen semiconductor packaging
hybrid bonding
chiplets
3D integration
semiconductor packaging
interconnect density