Description
High purity 99.9% (3N) Vanadium Dioxide (VO2) sputtering targets for thin film deposition applications. Available in various diameters and thicknesses, with optional copper backing for enhanced thermal conductivity. May contain trace phases of V2O3 and V2O5 as impurities.
| Configuration | Dimensions | Purity | Packaging |
|---|---|---|---|
| Standard VO2 Target | φ60×3mm | 99.9% (may contain V2O3/V2O5 phases) | 1 piece per pack |
| Copper-Backed VO2 Target | φ60×3mm (VO2) + 2mm Cu backing | 99.9% (may contain V2O3/V2O5 phases) | 1 piece per pack |
| Standard VO2 Target | φ75×6mm | 99.9% (may contain V2O3/V2O5 phases) | 1 piece per pack |
If you are interested or have any questions, please contact us at inquiry@atomfair.com
Disclaimer: Sold exclusively for laboratory research.
Every advanced material, component, equipment, and instrument in our catalog is backed by rigorous testing. We maintain strict internal quality management frameworks and align with CE conformity metrics to deliver transparent, reproducible performance data via our public open-science repository.
To request raw batch performance data, submit formal vendor registration paperwork, or execute a fast-turnaround R&D manufacturing loop, contact us at inquiry@atomfair.com.
Item is dispatched under the Atomfair Shipping & Delivery Framework (Free worldwide shipping on orders over $59 USD). Return is governed by the Atomfair Return & Refund Policy (7-day technical return window).

