Through plasma-enhanced atomic layer deposition for next-generation semiconductor fabrication
semiconductor fabrication
atomic layer deposition
plasma-enhanced processes
nanomanufacturing
thin-film growth
At terahertz oscillation frequencies for next-generation wireless communication networks
terahertz waves
6G networks
photonics
semiconductor devices
atmospheric absorption
Mitigating self-heating effects in 3nm semiconductor nodes through advanced thermal materials
3nm nodes
self-heating mitigation
thermal management
semiconductor cooling
nanoelectronics
With albedo-modifying urban materials using gate-all-around nanosheet transistors
albedo modification
urban materials
nanosheet transistors
smart coatings
thermal regulation
Through EUV mask defect mitigation in yoctogram mass measurements
EUV lithography
mask defects
yoctogram
mass spectrometry
nanofabrication
Achieving picometer precision in EUV mask defect mitigation via self-assembling monolayers
EUV lithography
mask defects
self-assembly monolayers
semiconductor manufacturing
atomic precision
Optimizing atomic layer etching for 2nm semiconductor nodes with plasma precision control
atomic layer etching
2nm nodes
plasma control
semiconductor fabrication
precision etching
Integrating glacier physics with semiconductor design for energy-efficient cooling systems
glacier dynamics
semiconductor cooling
thermal management
energy efficiency
microelectronics
Investigating self-heating mitigation strategies in 3nm semiconductor nodes for improved thermal management
semiconductor thermal management
3nm nodes
self-heating mitigation
transistor reliability
advanced cooling
Preparing for 2032 processor nodes with advanced lithography techniques
lithography
semiconductor
transistor scaling
EUV
chip fabrication
Through lights-out production to achieve zero-defect manufacturing in semiconductor fabs
lights-out production
semiconductor manufacturing
automation
defect reduction
Industry 4.0
Optimizing 2nm semiconductor fabrication using atomic layer etching with sub-angstrom precision
atomic layer etching
2nm nodes
semiconductor fabrication
nanomanufacturing
precision engineering