Description
This high-purity Aluminum Nitride (AlN) sputtering target is ideal for thin film deposition in semiconductor and optical applications. Available in various diameters and thicknesses, with optional copper backing for enhanced thermal conductivity. The 99.5% purity ensures consistent performance in demanding deposition processes.
| Diameter (mm) | Thickness (mm) | Configuration | Packing | Pack Size |
|---|---|---|---|---|
| 50 | 3 | Standard or with 2mm copper backing | Piece | 1 |
| 50.8 | 3 | Standard or with 2mm copper backing | Piece | 1 |
| 50 | 4 | Standard or with 2mm copper backing | Piece | 1 |
| 50.8 | 4 | Standard or with 2mm copper backing | Piece | 1 |
| 50 | 5 | Standard | Piece | 1 |
| 50 | 6 | Standard | Piece | 1 |
| 50.8 | 5 | Standard | Piece | 1 |
| 50.8 | 6 | Standard | Piece | 1 |
| 60 | 3 | Standard or with 2mm copper backing | Piece | 1 |
| 60 | 4 | Standard or with 2mm copper backing | Piece | 1 |
| 60 | 5 | Standard | Piece | 1 |
| 60 | 6 | Standard | Piece | 1 |
| 76.2 | 3 | Standard or with 2mm copper backing | Piece | 1 |
| 76.2 | 4 | Standard or with 2mm copper backing | Piece | 1 |
| 76.2 | 5 | Standard | Piece | 1 |
| 76.2 | 6 | Standard | Piece | 1 |
| 80 | 3 | Standard or with 2mm copper backing | Piece | 1 |
| 80 | 4 | Standard or with 2mm copper backing | Piece | 1 |
| 80 | 5 | Standard | Piece | 1 |
| 80 | 6 | Standard | Piece | 1 |
| 101.6 | 3 | Standard or with 2mm copper backing | Piece | 1 |
| 101.6 | 4 | Standard or with 2mm copper backing | Piece | 1 |
| 101.6 | 5 | Standard | Piece | 1 |
| 101.6 | 6 | Standard | Piece | 1 |
If you are interested or have any questions, please contact us at inquiry@atomfair.com
Disclaimer: Sold exclusively for laboratory research.


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