Description
This high-purity 99.99% (4N) zirconium oxide sputtering target is doped with 5.4% yttrium oxide (3 mol%) for enhanced stability and performance. Ideal for thin film deposition applications in semiconductor and optical coatings. Available in various diameters with optional copper backing for improved heat dissipation.
| Configuration | Diameter (mm) | Thickness (mm) | Backing | Packing |
|---|---|---|---|---|
| ZrO2 + 5.4% Y2O3 | 50.8 | 3 | None | 1 pc per pack |
| ZrO2 + 5.4% Y2O3 | 50.8 | 3 | 2mm Copper | 1 pc per pack |
| ZrO2 + 5.4% Y2O3 | 60 | 3 | None | 1 pc per pack |
| ZrO2 + 5.4% Y2O3 | 60 | 3 | 2mm Copper | 1 pc per pack |
| ZrO2 + 5.4% Y2O3 | 76.2 | 3 | None | 1 pc per pack |
| ZrO2 + 5.4% Y2O3 | 76.2 | 3 | 2mm Copper | 1 pc per pack |
If you are interested or have any questions, please contact us at inquiry@atomfair.com
Disclaimer: Sold exclusively for laboratory research.
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