Description

Tetrafluoromethane (CF₄) is a highly stable, non-flammable, and inert perfluorocarbon compound widely utilized in scientific and industrial applications. With a molecular formula of CF₄ and CAS number 75-73-0, this colorless, odorless gas exhibits exceptional thermal and chemical resistance, making it ideal for demanding environments. Its high dielectric strength and low global warming potential (compared to other fluorocarbons) have established it as a critical material in semiconductor manufacturing, plasma etching, and as a refrigerant in specialized cooling systems. Researchers value Tetrafluoromethane for its ultra-high purity (≥99.99%), which ensures consistent performance in sensitive processes such as reactive ion etching (RIE) of silicon and silicon dioxide. Packaged in high-pressure cylinders with certified weights, our CF₄ meets stringent industry standards (ISO, SEMI) for electronic-grade gases.

Properties

• CAS Number: 75-73-0
• Complexity: 19.1
• IUPAC Name: tetrafluoromethane
• InChI: InChI=1S/CF4/c2-1(3,4)5
• InChI Key: TXEYQDLBPFQVAA-UHFFFAOYSA-N
• LogP: log Kow = 1.18
• Exact Mass: 87.99361265
• Molecular Formula: CF4
• Molecular Weight: 88.004
• SMILES: C(F)(F)(F)F
• Monoisotopic Mass: 87.99361265
• Physical Description: Tetrafluoromethane is a colorless nonflammable gas. It is shipped as a liquid under pressure. It may be narcotic at high concentrations. Under prolonged exposure to fire or heat the containers may rupture violently and rocket. It is used as a refrigerant.
• Color/Form: Colorless gas
• Odor: Odorless
• Boiling Point: -127.9 °C
• Melting Point: -183.582 °C
• Solubility: In water, 18.8 mg/L at 25 °C
• Density: 3.034 g/cu cm at 25 °C
• Vapor Density: Relative vapor density : 3.04
• Vapor Pressure: 1.75X10+5 mm Hg at 25 °C /extrapolated/
• Henry’s Law Constant: Henry’s Law constant = 5.15 atm-cu m/mole at 25 °C
• Stability/Shelf Life: Stable under recommended storage conditions.
• Autoignition Temperature: >/= 1100 °C
• Synonyms: CARBON TETRAFLUORIDE, Tetrafluoromethane, 75-73-0, Perfluoromethane, Carbon fluoride, Tetrafluorocarbon, Freon 14, Halon 14, Methane, tetrafluoro-, Refrigerant 14, Halocarbon 14, Arcton 0, Refrigerant R 14, Fluorocarbon 14, R 14 (Refrigerant), Carbon fluoride (CF4), Tetrafluormethan, tetrafluoridocarbon, CFC 14, Tetrafluorkohlenstoff, FC 14, Ftoksilol, Ftoxycol, HSDB 1327, UNII-94WG9QG0JN, EINECS 200-896-5, 94WG9QG0JN, UN1982, DTXSID2041757, CHEBI:38825, TETRAFLUOROMETHANE [HSDB], CARBON TETRAFLUORIDE [MI], Methane, tetrafluoro, KHLADON 14, FREON R 14, PFC 14, DTXCID0021757, DTXSID601014539, CARBON TETRAFLUORIDE (CF4), TETRAFLUOROMETHANE, COMPRESSED, REFRIGERANT GAS R-14, COMPRESSED, 200-896-5, 257-131-3, perfluorocarbon, F 14, R 14, CF4, MFCD00000371, Tetrafluoromethane (FC-14), tetrakis(fluoranyl)methane, SCHEMBL24604, Carbon tetrafluoride, 99.9%, SCHEMBL14721708, TXEYQDLBPFQVAA-UHFFFAOYSA-, AKOS015839796, UN 1982, InChI=1/CF4/c2-1(3,4)5, NS00041249, A838500, Q423055, Tetrafluoromethane, compressed or Refrigerant gas R 14, Tetrafluoromethane, compressed or Refrigerant gas R 14 [UN1982] [Nonflammable gas]

Application

Tetrafluoromethane is primarily employed as a plasma etchant in semiconductor fabrication, where it selectively removes silicon and silicon dioxide layers with high precision. In the electronics industry, it serves as a dielectric medium in high-voltage transformers and circuit breakers due to its excellent insulating properties. Additionally, CF₄ is used in trace gas analysis as a calibration standard and in specialized refrigeration systems requiring non-reactive coolants.

Safety and Hazards

GHS Hazard Statements

• H280: Contains gas under pressure; may explode if heated [Warning Gases under pressure]

Precautionary Statements

• P410+P40, and 410+P403

Hazard Classes and Categories

• Skin Irrit. 2 (100%)
• Eye Irrit. 2 (100%)
• STOT SE 3 (100%)

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Disclaimer: Sold exclusively for laboratory research. Prohibited for commercial use, diagnostics, or human/animal applications. Buyers assume all compliance liability.