Description

Silanamine, N,N-disilyl- (CAS No. 13862-16-3) is a highly specialized organosilicon compound with the molecular formula H₉NSi₃. This unique chemical features a central nitrogen atom bonded to three silyl groups, making it a valuable precursor in advanced silicon-based material synthesis. As a volatile, reactive silane derivative, it is particularly useful in chemical vapor deposition (CVD) processes for creating silicon nitride films and other silicon-containing nanomaterials. The compound is typically handled under inert atmosphere due to its sensitivity to moisture and air. Available in high purity grades suitable for research and industrial applications, this material is packaged in sealed ampoules or cylinders to ensure stability. Researchers working in semiconductor fabrication, nanotechnology, and advanced materials science will find this compound essential for developing novel silicon-based architectures.

Properties

• CAS Number: 13862-16-3
• Complexity: 8
• IUPAC Name: trisilylamine
• InChI: InChI=1S/H9NSi3/c2-1(3)4/h2-4H3
• InChI Key: VOSJXMPCFODQAR-UHFFFAOYSA-N
• Exact Mass: 107.00427889
• Molecular Formula: H9NSi3
• Molecular Weight: 107.33
• SMILES: N([SiH3])([SiH3])[SiH3]
• Topological: 3.2
• Monoisotopic Mass: 107.00427889
• Synonyms: Silanamine, N,N-disilyl-, 13862-16-3, DTXSID80160732, DTXCID3083223, TRISILYLAMINE, SCHEMBL49335, N (Si H3)3, VOSJXMPCFODQAR-UHFFFAOYSA-N, Q16736825

Application

Silanamine, N,N-disilyl- serves as a crucial precursor in semiconductor manufacturing for depositing silicon nitride thin films via CVD. The compound finds application in nanotechnology research for creating silicon-based nanostructures and quantum dots. In materials science, it’s used to develop advanced ceramic materials with enhanced thermal and mechanical properties. Its reactivity makes it valuable in organometallic chemistry for synthesizing novel silicon-nitrogen compounds.

Safety and Hazards

GHS Hazard Statements

• H225 (100%): Highly Flammable liquid and vapor [Danger Flammable liquids]
• H260 (39.7%): In contact with water releases flammable gases which may ignite spontaneously [Danger Substances and mixtures which in contact with water, emit flammable gases]
• H302 (36.5%): Harmful if swallowed [Warning Acute toxicity, oral]
• H312 (36.5%): Harmful in contact with skin [Warning Acute toxicity, dermal]
• H314 (38.1%): Causes severe skin burns and eye damage [Danger Skin corrosion/irritation]
• H315 (61.9%): Causes skin irritation [Warning Skin corrosion/irritation]
• H319 (61.9%): Causes serious eye irritation [Warning Serious eye damage/eye irritation]
• H330 (38.1%): Fatal if inhaled [Danger Acute toxicity, inhalation]
• H335 (60.3%): May cause respiratory irritation [Warning Specific target organ toxicity, single exposure; Respiratory tract irritation]

Precautionary Statements

• P210, P223, P231+P232, P233, P240, P241, P242, P243, P260, P261, P264, P264+P265, P270, P271, P280, P284, P301+P317, P301+P330+P331, P302+P335+P334, P302+P352, P302+P361+P354, P303+P361+P353, P304+P340, P305+P351+P338, P305+P354+P338, P316, P317, P319, P320, P321, P330, P332+P317, P337+P317, P362+P364, P363, P370+P378, P402+P404, P403+P233, P403+P235, P405, and P501

Hazard Classes and Categories

• Flam. Liq. 2 (100%)
• Water-react. 1 (39.7%)
• Acute Tox. 4 (36.5%)
• Acute Tox. 4 (36.5%)
• Skin Corr. 1A (38.1%)
• Skin Irrit. 2 (61.9%)
• Eye Irrit. 2 (61.9%)
• Acute Tox. 1 (38.1%)
• STOT SE 3 (60.3%)

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Disclaimer: Sold exclusively for laboratory research. Prohibited for commercial use, diagnostics, or human/animal applications. Buyers assume all compliance liability.