Description

Pentakis(dimethylamino)tantalum(V) (CAS No. 19824-59-0) is a high-purity organometallic compound with the molecular formula C₁₀H₃₀N₅Ta. This thermally stable, moisture-sensitive compound is widely used in advanced materials science and thin-film deposition processes, particularly in the semiconductor industry. As a liquid precursor, it offers excellent volatility and decomposition characteristics for atomic layer deposition (ALD) and chemical vapor deposition (CVD) of tantalum-containing films. The compound features five dimethylamino ligands coordinated to a central tantalum(V) center, providing unique reactivity for nanoscale material synthesis. Our product is rigorously tested to meet the highest standards of purity and consistency, with specialized packaging options available for air-sensitive materials.

Properties

• CAS Number: 19824-59-0
• Complexity: 30.8
• IUPAC Name: dimethylazanide;tantalum(5+)
• InChI: InChI=1S/5C2H6N.Ta/c5*1-3-2;/h5*1-2H3;/q5*-1;+5
• InChI Key: VSLPMIMVDUOYFW-UHFFFAOYSA-N
• Exact Mass: 401.19812
• Molecular Formula: C10H30N5Ta
• Molecular Weight: 401.33
• SMILES: C[N-]C.C[N-]C.C[N-]C.C[N-]C.C[N-]C.[Ta+5]
• Topological: 5
• Monoisotopic Mass: 401.19812
• Synonyms: Pentakis(dimethylamino)tantalum(V), 624-567-4, 19824-59-0, Pentakis(dimethylamino)tantalum, Tantalum, pentakis(dimethylamino)-, dimethylazanide;tantalum(5+), dimethyl[tetrakis(dimethylamino)tantalio]amine, Methanamine, N-methyl-, tantalum(5+) salt (5:1), Ta(NMe2)5, MFCD01631286, SCHEMBL210404, DTXSID60173547, AKOS030529748, Pentakis(dimethylamino)tantalum, INTEGRA, AS-67586, DB-009793, Pentakis(dimethylamino)tantalum(V), 99.99%, G86196

Application

Pentakis(dimethylamino)tantalum(V) serves as a crucial precursor for depositing tantalum nitride (TaN) and tantalum oxide (Ta₂O₅) thin films in semiconductor manufacturing. It enables the production of diffusion barriers and high-k dielectric materials in advanced microelectronic devices. The compound is particularly valuable in atomic layer deposition processes where precise thickness control is required. Researchers also utilize it for developing specialized catalysts and investigating organometallic reaction mechanisms. Its applications extend to photonic materials and protective coatings for extreme environments.

Safety and Hazards

GHS Hazard Statements

• H228 (98.4%): Flammable solid [Danger Flammable solids]
• H260 (98.4%): In contact with water releases flammable gases which may ignite spontaneously [Danger Substances and mixtures which in contact with water, emit flammable gases]
• H314 (100%): Causes severe skin burns and eye damage [Danger Skin corrosion/irritation]

Precautionary Statements

• P210, P223, P231+P232, P240, P241, P260, P264, P280, P301+P330+P331, P302+P335+P334, P302+P361+P354, P304+P340, P305+P354+P338, P316, P321, P363, P370+P378, P402+P404, P405, and P501

Hazard Classes and Categories

• Flam. Sol. 1 (98.4%)
• Water-react. 1 (98.4%)
• Skin Corr. 1B (100%)

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