Description

Hexamethyldisiloxane (HMDSO) is a highly versatile organosilicon compound with the molecular formula C₆H₁₈OSi₂. This clear, colorless liquid is characterized by its low viscosity, high volatility, and excellent thermal stability, making it a valuable reagent in industrial and laboratory applications. HMDSO is widely used as a precursor in plasma-enhanced chemical vapor deposition (PECVD) for thin-film coatings, as a surface modifier, and as a hydrophobic agent. Its inert nature and compatibility with organic and inorganic substrates ensure reliable performance in semiconductor manufacturing, nanotechnology, and polymer synthesis. With a CAS number 107-46-0, this compound is rigorously tested for purity and consistency, meeting the stringent requirements of researchers and scientists.

Properties

• CAS Number: 107-46-0
• Complexity: 76.2
• IUPAC Name: trimethyl(trimethylsilyloxy)silane
• InChI: InChI=1S/C6H18OSi2/c1-8(2,3)7-9(4,5)6/h1-6H3
• InChI Key: UQEAIHBTYFGYIE-UHFFFAOYSA-N
• LogP: log Kow = 4.2
• Exact Mass: 162.08961826
• Molecular Formula: C6H18OSi2
• Molecular Weight: 162.38
• SMILES: C[Si](C)(C)O[Si](C)(C)C
• Topological: 9.2
• Monoisotopic Mass: 162.08961826
• Physical Description: Dry Powder; Liquid
• Color/Form: FLUID
• Boiling Point: 99 °C
• Melting Point: -66 °C
• Flash Point: -30 °C
• Solubility: In water, 0.93 mg/L at 25 °C
• Density: 0.7638 at 20 °C
• Vapor Pressure: 42.0 [mmHg]
• Henry’s Law Constant: Henry’s Law constant = 4.53X10-2 atm-cu m/mol at 25 °C
• Viscosity: 0.51 centistokes at 20 °C
• Refractive Index: Index of Refraction: 1.3774 at 20 °C
• Synonyms: HEXAMETHYLDISILOXANE, 107-46-0, Disiloxane, hexamethyl-, Oxybis(trimethylsilane), HMDSO, Fluka AG, Hexamethyl disiloxane, Bis(trimethylsilyl)ether, Belsil DM 0.65, Bis(trimethylsilyl)oxide, Bistrimethylsilyl ether, Bis-trimethylsilyl oxide, KF 96L, Bis(trimethylsilyl) oxide, Silane, oxybis(trimethyl-, SWS-F 221, OS 10, NSC 43346, CCRIS 1325, HSDB 5378, EINECS 203-492-7, UNII-D7M4659BPU, Dow corning 200, D7M4659BPU, ((CH3)3Si)2O, AEC DISILOXANE, DTXSID4026769, CHEBI:78002, MIRASIL HMS, AI3-51466, NSC-43346, VOLASIL DM-0.65, DTXCID406769, SI-TEC DM 0.65, EC 203-492-7, SF1000N-0.65CST, NSC43346, SF1000N-0.65 cSt, Xiameter PMX-200 Silicone Fluid 0.65 cSt, 203-492-7, Bis(trimethylsilyl) ether, trimethyl(trimethylsilyloxy)silane, trimethylsilyl ether, Silane, oxybis(trimethyl)-, MFCD00008265, NCGC00164086-01, Disiloxane, 1,1,1,3,3,3-hexamethyl-, 26298-61-3, 1,1,1,3,3,3-Hexamethyldisiloxane, CAS-107-46-0, Dimethicone ~4000 (Polydimethylsiloxane), bis-tms ether, di-tms ether, TMS ether, trimethylsilylether, Dimethicone, BAN, Dimethicone (NF), hexamethyl-disiloxane, HMDO, Dimeticone (JAN/INN), Polydimethylsiloxane,PDMS, Sentry dimethicone (TN), DISILOXANE,HEXAMETHYL, SCHEMBL6413, Dow corning 200/0.65, Hexamethyldisiloxane NMR grade, Hexamethyldisiloxane, >=98%, SCHEMBL373489, SCHEMBL8728760, CHEMBL3184090, SCHEMBL17911300, SCHEMBL18227330, HEXAMETHYLDISILOXANE [MI], HEXAMETHYLDISILOXANE [HSDB], BCP11630, HEXAMETHYLDISILOXANE [VANDF], trimethyl[(trimethylsilyl)oxy]silane, Tox21_112082, Tox21_201713, Tox21_303119, Dimethyl Silicone Fluid Silicone Oil, AKOS000119927, Hexamethyldisiloxane (analytical grade), MSK001099-100M, 1,1,1,3,3,3-Hexamethyldisiloxane #, NCGC00164086-02, NCGC00257007-01, NCGC00259262-01, FD165432, DB-040758, H0091, H7310, Hexamethyldisiloxane, NMR grade, >=99.5%, NS00041276, WLN: 1-SI-1&1&O-SI-1&1&1, Hexamethyldisiloxane, puriss., >=98.5% (GC), A801702, Hexamethyldisiloxane, viscosity 0.65 cSt (25 C), Q419440, Hexamethyldisiloxane Solution in Methanol, 100ug/mL, BRD-K26674746-001-01-4, F0001-0143, Z104473212, Hexamethyldisiloxane, for GC derivatization, >=98% (GC), InChI=1/C6H18OSi2/c1-8(2,3)7-9(4,5)6/h1-6H

Application

Hexamethyldisiloxane (HMDSO) is primarily employed in plasma deposition processes to create silicon oxide-based thin films for microelectronics and protective coatings. It serves as a key reagent in surface treatment applications, imparting water-repellent properties to glass, metals, and polymers. Additionally, HMDSO is utilized as a carrier fluid in heat transfer systems and as a intermediate in the synthesis of silicone-based materials.

Safety and Hazards

GHS Hazard Statements

• H225: Highly Flammable liquid and vapor [Danger Flammable liquids]
• H315: Causes skin irritation [Warning Skin corrosion/irritation]
• H332: Harmful if inhaled [Warning Acute toxicity, inhalation]
• H372: Causes damage to organs through prolonged or repeated exposure [Danger Specific target organ toxicity, repeated exposure]
• H400: Very toxic to aquatic life [Warning Hazardous to the aquatic environment, acute hazard]
• H410: Very toxic to aquatic life with long lasting effects [Warning Hazardous to the aquatic environment, long-term hazard]

Precautionary Statements

• P210, P233, P240, P241, P242, P243, P260, P261, P264, P270, P271, P273, P280, P302+P352, P303+P361+P353, P304+P340, P317, P319, P321, P332+P317, P362+P364, P370+P378, P391, P403+P235, and P501

Hazard Classes and Categories

• Flammable liquids – Category 2
• Acute toxicity – Category 4
• Skin corrosion/irritation – Category 2
• Specific target organ toxicity – Repeated exposure – Category 1 )
• Hazardous to the aquatic environment – Category 1
• Hazardous to the aquatic environment – Category 1

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