Description

Hexamethyldisilazane (CAS: 999-97-3), also known as Bis(trimethylsilyl)amine, is a highly versatile organosilicon compound with the molecular formula C₆H₁₉NSi₂. This clear, colorless liquid is widely used as a silylating agent in organic synthesis, pharmaceuticals, and surface modification applications. Its IUPAC name, [dimethyl-(trimethylsilylamino)silyl]methane, reflects its unique chemical structure. With a purity of ≥98%, our Hexamethyldisilazane is ideal for sensitive reactions requiring anhydrous conditions. It is packaged under inert gas to ensure stability and shipped with detailed technical data sheets. Common synonyms include HMDS, 1,1,1,3,3,3-Hexamethyldisilazane, and Hexamethylsilazane.

Properties

• CAS Number: 999-97-3
• Complexity: 76.2
• IUPAC Name: [dimethyl-(trimethylsilylamino)silyl]methane
• InChI: InChI=1S/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3
• InChI Key: FFUAGWLWBBFQJT-UHFFFAOYSA-N
• LogP: log Kow = 2.62 /Estimated/
• Exact Mass: 161.10560268
• Molecular Formula: C6H19NSi2
• Molecular Weight: 161.39
• SMILES: C[Si](C)(C)N[Si](C)(C)C
• Topological: 12
• Monoisotopic Mass: 161.10560268
• Physical Description: Hexamethyl disilazane appears as a liquid. May be toxic by ingestion. Irritates skin and eyes. Vapors are heavier than air. May emit highly toxic nitrogen oxide fumes when heated to decomposition. Used to make other chemicals.
• Color/Form: Colorless liquid
• Odor: Ammonia-like odor
• Boiling Point: 125 °C
• Flash Point: 48 °F
• Solubility: Soluble in acetone, benzene, ethyl ether, heptane, perchloroethylene
• Density: 0.7741 g/cu cm at 25 °C
• Vapor Pressure: 13.8 [mmHg]
• Henry’s Law Constant: Henry’s Law constant = 8.69X10-5 atm cu-m/mol at 25 °C /Estimated/
• Autoignition Temperature: 325 °C at 1013 hPa
• Viscosity: 0.90 centistokes
• Refractive Index: Index of refraction = 1.4090 @ 20 °C
• Dissociation Constants: pKa = 7.55
• Synonyms: Hexamethyldisilazane, 999-97-3, Bis(trimethylsilyl)amine, 1,1,1,3,3,3-Hexamethyldisilazane, Hexamethylsilazane, Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-, hexamethyl disilazane, hexamethyldisilylamine, NSC 93895, CCRIS 2456, HSDB 7226, (TMS)2NH, EINECS 213-668-5, UNII-H36C68P1BH, ((CH3)3Si)2NH, DTXSID2025395, CHEBI:85068, AI3-51467, NSC-93895, Trimethyl-N-(trimethylsilyl)silanamine, DISILAZANE,HEXAMETHYL, DTXCID805395, HEXAMETHYLDISILAZANE [MI], EC 213-668-5, HEXAMETHYLDISILAZANE [HSDB], hexamethylsilizane, di(trimethylsilyl)amine, HMDS (SILAZANE), HMDS 3, 1,1,1,3,3,3hexamethyldisilazane, Disilazane, 1,1,1,3,3,3hexamethyl, LS 7150, 1, 1, 1, 3, 3, 3-hexamethyldisilazane, Silanamine, 1,1,1trimethylN(trimethylsilyl), ffuagwlwbbfqjt-uhfffaoysa-n, inchi=1/c6h19nsi2/c1-8(2,3)7-9(4,5)6/h7h,1-6h, trisil, un1993, HMDS, 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine, TSL 8802, Disilazane, 1,1,1,3,3,3-hexamethyl-, [dimethyl-(trimethylsilylamino)silyl]methane, SZ 6079, MFCD00008259, H36C68P1BH, 1,1,3,3,3-Hexamethyldisilazane, Bis(trimethylsilyl)amidolithium, Hexamethyl disilylamine, OAP, bis(trimethylsilyl)amine;[dimethyl-(trimethylsilylamino)silyl]methane, Lithiumbis(trimethylsilyl)amine, hexamethyldisilazane (hmds), hexamethyldisilizane, Lithium tris(trimethylsilyl)amine, CAS-999-97-3, NSC-252161, hexamethyldisilazan, hexamethyidisilazane, hexa-methyldisilazane, hexamethyl-disilazane, bistrimethylsilylamine, Me3SiNHSiMe3, bis-(trimethylsilyl)amine, (Me3Si)2NH, 1,1,1,3,3,3-HEXAMETHYL-DISILAZANE, HN(TMS)2, SCHEMBL7649, SCHEMBL50048, CHEMBL3183662, 1,1,3,3,3-hexamethyidisilazane, STR02905, 1,1,1,3,3,3-hexamethyldisilazan, Tox21_202428, Tox21_303281, 1,1,1,3,3,3 hexamethyldisilazane, 1,1,1,3,3,3-hexamethyidisilazane, 1,1,1.3,3,3-hexamethyldisilazane, NSC252161, STL185550, Disilazane,1,1,3,3,3-hexamethyl-, 1,1,1, 3,3,3-hexamethyldisilazane, 1,1,1,3,3,3,-hexamethyldisilazane, AKOS000120987, NCGC00164366-01, NCGC00164366-02, NCGC00257230-01, NCGC00259977-01, BP-21394, H0089, Hexamethyldisilazane, reagent grade, >=99%, NS00043130, Hexamethyldisilazane, ReagentPlus(R), 99.9%, Silanamine,1,1-trimethyl-N-(trimethylsilyl)-, WLN: 1-SI-1&1&M-SI-1&1&1, Disilazane,1,1,3,3,3-hexamethyl-, lithium salt, Q425001, F0001-2345, Silanamine,1,1-trimethyl-N-(trimethylsilyl)-, lithium salt, Hexamethyldisilazane, for GC derivatization, >=99.0% (GC), 1,1,1,3,3,3-Hexamethyldisilazane; 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine, Hexamethyldisilazane, produced by Wacker Chemie AG, Burghausen, Germany, >=97.0% (GC)

Application

Hexamethyldisilazane is primarily used as a silylating agent to protect reactive functional groups (e.g., -OH, -NH) in organic synthesis. It serves as a key reagent in the production of silicon-based polymers and as a surface modifier in semiconductor manufacturing. Additionally, HMDS is employed in pharmaceutical intermediates and as a cleaning agent for glassware in laboratories.

Safety and Hazards

GHS Hazard Statements

• H225: Highly Flammable liquid and vapor [Danger Flammable liquids]
• H302: Harmful if swallowed [Warning Acute toxicity, oral]
• H311: Toxic in contact with skin [Danger Acute toxicity, dermal]
• H314: Causes severe skin burns and eye damage [Danger Skin corrosion/irritation]
• H320: Causes eye irritation [Warning Serious eye damage/eye irritation]
• H331: Toxic if inhaled [Danger Acute toxicity, inhalation]
• H335: May cause respiratory irritation [Warning Specific target organ toxicity, single exposure; Respiratory tract irritation]
• H336: May cause drowsiness or dizziness [Warning Specific target organ toxicity, single exposure; Narcotic effects]
• H370: Causes damage to organs [Danger Specific target organ toxicity, single exposure]
• H402: Harmful to aquatic life [Hazardous to the aquatic environment, acute hazard]
• H412: Harmful to aquatic life with long lasting effects [Hazardous to the aquatic environment, long-term hazard]

Precautionary Statements

• P210, P233, P240, P241, P242, P243, P260, P261, P262, P264, P264+P265, P270, P271, P273, P280, P301+P317, P301+P330+P331, P302+P352, P302+P361+P354, P303+P361+P353, P304+P340, P305+P351+P338, P305+P354+P338, P308+P316, P316, P319, P321, P330, P337+P317, P361+P364, P363, P370+P378, P403+P233, P403+P235, P405, and P501

Hazard Classes and Categories

• Flammable liquids – Category 2
• Acute toxicity – Category 4
• Acute toxicity – Category 3
• Acute toxicity – Category 3
• Skin corrosion/irritation – Category 1
• Serious eye damage/eye irritation – Category 2B
• Specific target organ toxicity – Single exposure – Category 1 , Category 3
• Hazardous to the aquatic environment – Category 3
• Hazardous to the aquatic environment – Category 3

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