Description
A 2-inch SiC substrate available in industrial, research, and dummy grades. Designed for applications requiring high-power, high-temperature, or high-frequency performance. Features precise orientation and low micropipe density.
| Parameter | Industrial Grade (P Grade) | Research Grade (R Grade) | Dummy Grade (D Grade) |
|---|---|---|---|
| Diameter | 50.8mm±0.38mm | 50.8mm±0.38mm | 50.8mm±0.38mm |
| Thickness | 350um±25 um | 350um±25 um | 350um±25 um |
| Wafer Orientation | Off axis: 2.0°-4.0° toward [1120] ±0.5° (4H/6H-P), On axis:(111)±0.5° (3C-N) | Off axis: 2.0°-4.0° toward [1120] ±0.5° (4H/6H-P), On axis:(111)±0.5° (3C-N) | Off axis: 2.0°-4.0° toward [1120] ±0.5° (4H/6H-P), On axis:(111)±0.5° (3C-N) |
| Micropipe Density | 0cm² | 0cm² | 0cm² |
| Resistivity (4H/6H-P) | ≤0.10Ω·cm | ≤0.10Ω·cm | ≤0.10Ω·cm |
| Resistivity (3C-N) | ≤0.8mΩ·cm | ≤0.8mΩ·cm | ≤0.8mΩ·cm |
| Primary Flat Orientation (4H/6H-P) | {10-10}±5.0° | {10-10}±5.0° | {10-10}±5.0° |
| Primary Flat Orientation (3C-N) | {1-10}±5.0° | {1-10}±5.0° | {1-10}±5.0° |
| Primary Flat Length | 15.9mm±1.7mm | 15.9mm±1.7mm | 15.9mm±1.7mm |
| Secondary Flat Length | 8.0mm±1.7mm | 8.0mm±1.7mm | 8.0mm±1.7mm |
| Secondary Flat Orientation | 90° CW from Prime flat ±5.0° | 90° CW from Prime flat ±5.0° | 90° CW from Prime flat ±5.0° |
| Edge Exclusion | 3mm | 3mm | 3mm |
| TTV/Bow/Warp | ≤2.5μm/≤5μm/≤15μm/≤30μm | ≤2.5μm/≤5μm/≤15μm/≤30μm | ≤2.5μm/≤5μm/≤15μm/≤30μm |
| Surface Roughness (Polish) | Ra≤1 nm | Ra≤1 nm | Ra≤1 nm |
| Surface Roughness (CMP) | Ra≤0.2 nm | Ra≤0.2 nm | Ra≤0.2 nm |
| Edge Cracks | None | 1 allowed, ≤1 mm | None |
| Hex Plates | ≤1% cumulative area | ≤3% cumulative area | ≤3% cumulative area |
| Polytype Areas | None | ≤2% cumulative area | ≤5% cumulative area |
| Si Surface Scratches | ≤3 scratches, ≤1×wafer diameter cumulative length | ≤5 scratches, ≤1×wafer diameter cumulative length | ≤8 scratches, ≤1×wafer diameter cumulative length |
| Edge Chips | None | ≤3 allowed, ≤0.5 mm each | ≤5 allowed, ≤1 mm each |
| Si Surface Contamination | None | None | None |
| Packaging | Multi-wafer Cassette or Single Wafer Container | Multi-wafer Cassette or Single Wafer Container | Multi-wafer Cassette or Single Wafer Container |
If you are interested or have any questions, please contact us at inquiry@atomfair.com
Disclaimer: Sold exclusively for laboratory research.
