Atomfair Trimethylsilane TMS; (CH3)3SiH C3H10Si CAS 993-07-7

Trimethylsilane (CAS No. 993-07-7) is a highly versatile organosilicon compound with the molecular formula C3H10Si. This colorless, flammable gas is widely utilized in semiconductor manufacturing, chemical vapor deposition (CVD), and as a precursor for silicon-based materials. Its high purity and reactivity make it ideal for advanced research applications, including surface modification, thin-film coatings, and nanotechnology. Trimethylsilane is packaged in specialized cylinders under pressure to ensure stability and safety during transport and storage. Suitable for laboratory, industrial, and electronic-grade applications, this product meets stringent quality standards for researchers and scientists requiring precise and reliable chemical reagents.

Description

Trimethylsilane (CAS No. 993-07-7) is a highly versatile organosilicon compound with the molecular formula C3H10Si. This colorless, flammable gas is widely utilized in semiconductor manufacturing, chemical vapor deposition (CVD), and as a precursor for silicon-based materials. Its high purity and reactivity make it ideal for advanced research applications, including surface modification, thin-film coatings, and nanotechnology. Trimethylsilane is packaged in specialized cylinders under pressure to ensure stability and safety during transport and storage. Suitable for laboratory, industrial, and electronic-grade applications, this product meets stringent quality standards for researchers and scientists requiring precise and reliable chemical reagents.

Properties

  • CAS Number: 993-07-7
  • Complexity: 8
  • IUPAC Name: trimethylsilane
  • InChI: InChI=1S/C3H10Si/c1-4(2)3/h4H,1-3H3
  • InChI Key: PQDJYEQOELDLCP-UHFFFAOYSA-N
  • Exact Mass: 74.055176853
  • Molecular Formula: C3H10Si
  • Molecular Weight: 74.20
  • SMILES: C[SiH](C)C
  • Monoisotopic Mass: 74.055176853
  • Physical Description: Gas or Vapor
  • Synonyms: DTXSID60870822, Silane, trimethyl, DTXCID50203443, 213-603-0, (CH3)3SiH, 2-Methyl-2-silapropane, 993-07-7, einecs 213-603-0, pqdjyeqoeldlcp-uhfffaoysa-n, Silane, trimethyl-, Trimethylsilane, un3161, unii-9l70djh2k0, Trimethysilane, trimethyl silane, (trimethyl)silane, Trimethylsilyl hydride, SCHEMBL29016, SCHEMBL217606, SCHEMBL1242763, SY068721, NS00043056, G77544, Q1102218

Trimethylsilane is primarily used as a silicon source in CVD processes for depositing silicon-containing thin films in semiconductor fabrication. It also serves as a reducing agent in organic synthesis and as a surface modifier in nanomaterials research. Additionally, its hydride functionality enables applications in polymer chemistry and catalytic systems. Researchers value its role in creating hydrophobic coatings and silicon carbide precursors.

Safety and Hazards

GHS Hazard Statements

  • H220 (82%): Extremely flammable gas [Danger Flammable gases]
  • H224 (18%): Extremely flammable liquid and vapor [Danger Flammable liquids]
  • H280 (99.5%): Contains gas under pressure; may explode if heated [Warning Gases under pressure]
  • H315 (18.9%): Causes skin irritation [Warning Skin corrosion/irritation]
  • H319 (18.9%): Causes serious eye irritation [Warning Serious eye damage/eye irritation]
  • H335 (18.9%): May cause respiratory irritation [Warning Specific target organ toxicity, single exposure; Respiratory tract irritation]

Precautionary Statements

  • P203, P210, P222, P233, P240, P241, P242, P243, P261, P264, P264+P265, P271, P280, P302+P352, P303+P361+P353, P304+P340, P305+P351+P338, P319, P321, P332+P317, P337+P317, P362+P364, P370+P378, P377, P381, P403, P403+P233, P403+P235, P405, P410+P403, and P501

Hazard Classes and Categories

  • Flam. Gas 1 (82%)
  • Flam. Liq. 1 (18%)
  • Press. Gas (99.5%)
  • Skin Irrit. 2 (18.9%)
  • Eye Irrit. 2 (18.9%)
  • STOT SE 3 (18.9%)

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Disclaimer: Sold exclusively for laboratory research. Prohibited for commercial use, diagnostics, or human/animal applications. Buyers assume all compliance liability.

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