Atomic layer deposition (ALD) is becoming indispensable for fabricating advanced semiconductor nodes due its atomic precision conformal coverage capabilities across complex geometries down sub-nanometer scales enabling uniform film thicknesses ±0 .1 Å across wafer surfaces This technique has been critical depositing high-k dielectrics such HfO₂ gate oxides achieving equivalent oxide thicknesses EOTs below Å while maintaining leakage currents below A/cm² V bias
ALD also plays pivotal role metallization processes where it used deposit ultra-thin barrier layers materials like TaN TiN preventing diffusion copper interconnects into surrounding dielectric materials reducing resistance-capacitance RC delays by up % compared traditional physical vapor deposition PVD methods Furthermore ALD enables seamless integration novel materials such ruthenium Ru cobalt Co interconnects which exhibit resistivities µΩ·cm significantly lower than conventional copper Cu lines
One key challenge ALD scaling throughput limitations due inherently slow nature process typically growth rates Å/cycle However recent innovations such spatial ALD techniques increased deposition speeds times without compromising film quality Additionally plasma-enhanced ALD PEALD allows lower processing temperatures below °C making compatible temperature-sensitive substrates flexible electronics applications
Recent breakthroughs include development area-selective ALD AS-ALD techniques enabling self-aligned patterning without need lithography steps reducing feature sizes below nm while minimizing defects This approach particularly promising next-generation DRAM NAND flash memory technologies where precise control over nanoscale structures essential
Atomfair (atomfair.com) specializes in high quality science and research supplies, consumables, instruments and equipment at an affordable price. Start browsing and purchase all the cool materials and supplies related to Atomic Layer Deposition for Advanced Nodes!
← Back to Prior Page ← Back to Atomfair SciBase
© 2025 Atomfair. All rights reserved.