Description

Chlorine Trifluoride (ClF₃) is a highly reactive interhalogen compound with the molecular formula ClF₃ and CAS number 7990-91-2. This colorless to pale yellow-green gas or liquid is renowned for its extreme oxidative and fluorinating properties, making it one of the most aggressive chemicals known. It reacts violently with water, organic materials, and most metals, often resulting in ignition or explosion. Chlorine Trifluoride is typically handled in specialized corrosion-resistant equipment, such as nickel or Monel containers, due to its ability to attack glass and other common materials. Its IUPAC name, trifluoro-λ³-chlorane, reflects its molecular structure. Primarily used in industrial and research settings, ClF₃ demands stringent safety protocols, including inert gas handling and rigorous personal protective equipment (PPE).

Key Specifications:

• Molecular Weight: 92.45 g/mol
• Appearance: Colorless to pale yellow-green gas or liquid
• Boiling Point: 11.75°C (53.15°F)
• Melting Point: -76.34°C (-105.41°F)
• Density: 1.77 g/cm³ (liquid at boiling point)

Properties

• CAS Number: 7990-91-2
• Complexity: 8
• IUPAC Name: trifluoro-lambda3-chlorane
• InChI: InChI=1S/ClF3/c2-1(3)4
• InChI Key: JOHWNGGYGAVMGU-UHFFFAOYSA-N
• Exact Mass: 91.9640622
• Molecular Formula: ClF3
• Molecular Weight: 92.45
• SMILES: FCl(F)F
• Monoisotopic Mass: 91.9640622
• Physical Description: Chlorine trifluoride appears as a colorless gas or green liquid with a pungent odor. Boils at 53 °F. It reacts with water to form chlorine and hydrofluoric acid with release of heat. Contact with organic materials may result in spontaneous ignition. It is corrosive to metals and tissue. Prolonged exposure to low concentrations or short term exposure to high concentrations may result in adverse health effects. Under prolonged exposure to fire or intense heat the container may violently rupture and rocket.
• Color/Form: COLORLESS GAS; LIQUID IS YELLOW-GREEN IN COLOR; SOLID IS WHITE
• Odor: SOMEWHAT SWEET, SUFFOCATING ODOR
• Boiling Point: 53 °F at 760 mmHg
• Melting Point: -105 °F
• Solubility: Reacts with water
• Density: 1.85 at 51.8 °F – Denser than water; will sink
• Vapor Density: 3.21 – Heavier than air; will sink
• Vapor Pressure: 1.4 atm
• Stability/Shelf Life: …/Unstable/ in moist air…
• Viscosity: 0.448 mPa-s @ 290 deg K
• Heat of Vaporization: 27.50 kJ/mol
• Surface Tension: 26.6 mN/m @ 273 deg K
• Ionization Potential: 13.00 eV
• Synonyms: CHLORINE TRIFLUORIDE, Chlorotrifluoride, 7790-91-2, trifluorochlorine, Trifluorure de chlore, ClF3, Chlorine trifluoride (ClF3), HSDB 970, trifluoridochlorine, EINECS 232-230-4, UNII-921841L3N0, trifluoro-lambda(3)-chlorane, 921841L3N0, CHEBI:30123, DTXSID90893948, (ClF3), [ClF3], DTXCID801323992, CHLORINE FLUORIDE (CL2F6), 232-230-4, ctf, Chlorine fluoride (ClF3), trifluoro-lambda3-chlorane, 7990-91-2, Trifluorure de chlore [French], UN1749, trifluoro-^{3}-chlorane, CHLORINE TRIFLUORIDE [MI], JOHWNGGYGAVMGU-UHFFFAOYSA-N, tris(fluoranyl)-^{3}-chlorane, CHLORINE TRIFLUORIDE [HSDB], Chlorine trifluoride [UN1749] [Poison gas], A839288, Q411305

Application

Chlorine Trifluoride is primarily employed in the semiconductor industry for cleaning chemical vapor deposition (CVD) chambers and etching silicon-based materials due to its ability to remove stubborn deposits. It also serves as a fluorinating agent in nuclear fuel processing and rocket propellant systems. In research, ClF₃ is used to study high-energy reactions and extreme oxidation processes. Its reactivity necessitates controlled environments, often involving inert atmospheres and specialized equipment.

Safety and Hazards

GHS Hazard Statements

• H270: May cause or intensify fire; oxidizer [Danger Oxidizing gases]
• H280: Contains gas under pressure; may explode if heated [Warning Gases under pressure]
• H314: Causes severe skin burns and eye damage [Danger Skin corrosion/irritation]
• H318: Causes serious eye damage [Danger Serious eye damage/eye irritation]
• H330: Fatal if inhaled [Danger Acute toxicity, inhalation]
• H370: Causes damage to organs [Danger Specific target organ toxicity, single exposure]
• H372: Causes damage to organs through prolonged or repeated exposure [Danger Specific target organ toxicity, repeated exposure]

Precautionary Statements

• P220, P244, P260, P264, P264+P265, P270, P271, P280, P284, P301+P330+P331, P302+P361+P354, P304+P340, P305+P354+P338, P308+P316, P316, P317, P319, P320, P321, P363, P370+P376, P403, P403+P233, P405, P410+P403, and P501

Hazard Classes and Categories

• Oxidizing gases – Category 1
• Gases under pressure – Liquefied gas
• Acute toxicity – Category 2
• Skin corrosion/irritation – Category 1A-1C
• Serious eye damage/eye irritation – Category 1
• Specific target organ toxicity – Single exposure – Category 1
• Specific target organ toxicity – Repeated exposure – Category 1

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